5/25/2012	8:43:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	8:43:29 AM	Recipe started at 8:43 AM
5/25/2012	8:43:29 AM	Helium valve closed
5/25/2012	8:43:29 AM	H2 valve closed
5/25/2012	8:43:29 AM	BCl3 valve closed
5/25/2012	8:43:29 AM	PH3 valve closed
5/25/2012	8:43:29 AM	SiCl4 pre valve closed
5/25/2012	8:43:29 AM	SiCl4 post valve closed
5/25/2012	8:43:29 AM	Main Vac valve closed
5/25/2012	8:43:29 AM	Bypass valve closed
5/25/2012	8:43:29 AM	Bubbler valve closed
5/25/2012	8:43:29 AM	Helium MFC set to  0.000000
5/25/2012	8:43:29 AM	H2 MFC set to  0.000000
5/25/2012	8:43:29 AM	BCl3 MFC set to  0.000000
5/25/2012	8:43:29 AM	PH3 MFC set to  0.000000
5/25/2012	8:43:29 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:43:29 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:43:29 AM	Tube furnace set to 0
5/25/2012	8:43:32 AM	H2 valve closed
5/25/2012	8:43:32 AM	BCl3 valve closed
5/25/2012	8:43:32 AM	PH3 valve closed
5/25/2012	8:43:32 AM	SiCl4 pre valve closed
5/25/2012	8:43:32 AM	SiCl4 post valve closed
5/25/2012	8:43:32 AM	Main Vac valve closed
5/25/2012	8:43:32 AM	Bypass valve closed
5/25/2012	8:43:32 AM	Bubbler valve closed
5/25/2012	8:43:32 AM	Helium valve opened
5/25/2012	8:43:32 AM	Helium MFC set to  500.000000
5/25/2012	8:43:32 AM	H2 MFC set to  0.000000
5/25/2012	8:43:32 AM	BCl3 MFC set to  0.000000
5/25/2012	8:43:32 AM	PH3 MFC set to  0.000000
5/25/2012	8:43:32 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:43:32 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:43:32 AM	Tube furnace set to 0
5/25/2012	8:44:45 AM	Helium valve closed
5/25/2012	8:44:45 AM	H2 valve closed
5/25/2012	8:44:45 AM	BCl3 valve closed
5/25/2012	8:44:45 AM	PH3 valve closed
5/25/2012	8:44:45 AM	SiCl4 pre valve closed
5/25/2012	8:44:45 AM	SiCl4 post valve closed
5/25/2012	8:44:45 AM	Main Vac valve closed
5/25/2012	8:44:45 AM	Bypass valve closed
5/25/2012	8:44:45 AM	Bubbler valve closed
5/25/2012	8:44:45 AM	Helium MFC set to  0.000000
5/25/2012	8:44:45 AM	H2 MFC set to  0.000000
5/25/2012	8:44:45 AM	BCl3 MFC set to  0.000000
5/25/2012	8:44:45 AM	PH3 MFC set to  0.000000
5/25/2012	8:44:45 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:44:45 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:44:45 AM	Tube furnace set to 0
5/25/2012	8:44:46 AM	Run finished at 8:44 AM
5/25/2012	8:44:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	8:51:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	8:51:26 AM	Recipe started at 8:51 AM
5/25/2012	8:51:26 AM	Helium valve closed
5/25/2012	8:51:26 AM	H2 valve closed
5/25/2012	8:51:26 AM	BCl3 valve closed
5/25/2012	8:51:26 AM	PH3 valve closed
5/25/2012	8:51:26 AM	SiCl4 pre valve closed
5/25/2012	8:51:26 AM	SiCl4 post valve closed
5/25/2012	8:51:26 AM	Main Vac valve closed
5/25/2012	8:51:26 AM	Bubbler valve closed
5/25/2012	8:51:26 AM	Bypass valve opened
5/25/2012	8:51:26 AM	Helium MFC set to  0.000000
5/25/2012	8:51:26 AM	H2 MFC set to  0.000000
5/25/2012	8:51:26 AM	BCl3 MFC set to  0.000000
5/25/2012	8:51:26 AM	PH3 MFC set to  0.000000
5/25/2012	8:51:26 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:51:26 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:51:26 AM	Tube furnace set to 0
5/25/2012	8:52:35 AM	Helium valve closed
5/25/2012	8:52:35 AM	H2 valve closed
5/25/2012	8:52:35 AM	BCl3 valve closed
5/25/2012	8:52:35 AM	PH3 valve closed
5/25/2012	8:52:35 AM	SiCl4 pre valve closed
5/25/2012	8:52:35 AM	SiCl4 post valve closed
5/25/2012	8:52:35 AM	Main Vac valve closed
5/25/2012	8:52:35 AM	Bubbler valve closed
5/25/2012	8:52:35 AM	Bypass valve opened
5/25/2012	8:52:35 AM	Helium MFC set to  0.000000
5/25/2012	8:52:35 AM	H2 MFC set to  0.000000
5/25/2012	8:52:35 AM	BCl3 MFC set to  0.000000
5/25/2012	8:52:35 AM	PH3 MFC set to  0.000000
5/25/2012	8:52:35 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:52:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:52:35 AM	Tube furnace set to 0
5/25/2012	8:53:36 AM	Helium valve closed
5/25/2012	8:53:36 AM	H2 valve closed
5/25/2012	8:53:36 AM	BCl3 valve closed
5/25/2012	8:53:36 AM	PH3 valve closed
5/25/2012	8:53:36 AM	SiCl4 pre valve closed
5/25/2012	8:53:36 AM	SiCl4 post valve closed
5/25/2012	8:53:36 AM	Bypass valve closed
5/25/2012	8:53:36 AM	Bubbler valve closed
5/25/2012	8:53:36 AM	Main Vac valve opened
5/25/2012	8:53:36 AM	Helium MFC set to  0.000000
5/25/2012	8:53:36 AM	H2 MFC set to  0.000000
5/25/2012	8:53:36 AM	BCl3 MFC set to  0.000000
5/25/2012	8:53:36 AM	PH3 MFC set to  0.000000
5/25/2012	8:53:36 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:53:36 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:53:36 AM	Tube furnace set to 0
5/25/2012	8:53:37 AM	Run finished at 8:53 AM
5/25/2012	8:53:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	8:54:56 AM	Recipe started at 8:54 AM
5/25/2012	8:54:56 AM	Helium valve closed
5/25/2012	8:54:56 AM	H2 valve closed
5/25/2012	8:54:56 AM	BCl3 valve closed
5/25/2012	8:54:56 AM	PH3 valve closed
5/25/2012	8:54:56 AM	SiCl4 pre valve closed
5/25/2012	8:54:56 AM	SiCl4 post valve closed
5/25/2012	8:54:56 AM	Main Vac valve closed
5/25/2012	8:54:56 AM	Bypass valve closed
5/25/2012	8:54:56 AM	Bubbler valve closed
5/25/2012	8:54:56 AM	Helium MFC set to  0.000000
5/25/2012	8:54:56 AM	H2 MFC set to  0.000000
5/25/2012	8:54:56 AM	BCl3 MFC set to  0.000000
5/25/2012	8:54:56 AM	PH3 MFC set to  0.000000
5/25/2012	8:54:56 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:54:56 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:54:56 AM	Tube furnace set to 0
5/25/2012	8:55:00 AM	Helium valve closed
5/25/2012	8:55:00 AM	H2 valve closed
5/25/2012	8:55:00 AM	BCl3 valve closed
5/25/2012	8:55:00 AM	PH3 valve closed
5/25/2012	8:55:00 AM	SiCl4 pre valve closed
5/25/2012	8:55:00 AM	SiCl4 post valve closed
5/25/2012	8:55:00 AM	Main Vac valve closed
5/25/2012	8:55:00 AM	Bubbler valve closed
5/25/2012	8:55:00 AM	Bypass valve opened
5/25/2012	8:55:00 AM	Helium MFC set to  0.000000
5/25/2012	8:55:00 AM	H2 MFC set to  0.000000
5/25/2012	8:55:00 AM	BCl3 MFC set to  0.000000
5/25/2012	8:55:00 AM	PH3 MFC set to  0.000000
5/25/2012	8:55:00 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:55:00 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:55:00 AM	Tube furnace set to 0
5/25/2012	8:55:00 AM	Helium valve closed
5/25/2012	8:55:00 AM	H2 valve closed
5/25/2012	8:55:00 AM	BCl3 valve closed
5/25/2012	8:55:00 AM	PH3 valve closed
5/25/2012	8:55:00 AM	SiCl4 pre valve closed
5/25/2012	8:55:00 AM	SiCl4 post valve closed
5/25/2012	8:55:00 AM	Main Vac valve closed
5/25/2012	8:55:00 AM	Bubbler valve closed
5/25/2012	8:55:00 AM	Bypass valve opened
5/25/2012	8:55:00 AM	Helium MFC set to  0.000000
5/25/2012	8:55:00 AM	H2 MFC set to  0.000000
5/25/2012	8:55:00 AM	BCl3 MFC set to  0.000000
5/25/2012	8:55:00 AM	PH3 MFC set to  0.000000
5/25/2012	8:55:00 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:55:00 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:55:00 AM	Tube furnace set to 0
5/25/2012	8:55:02 AM	Helium valve closed
5/25/2012	8:55:02 AM	H2 valve closed
5/25/2012	8:55:02 AM	BCl3 valve closed
5/25/2012	8:55:02 AM	PH3 valve closed
5/25/2012	8:55:03 AM	SiCl4 pre valve closed
5/25/2012	8:55:03 AM	SiCl4 post valve closed
5/25/2012	8:55:03 AM	Bypass valve closed
5/25/2012	8:55:03 AM	Bubbler valve closed
5/25/2012	8:55:03 AM	Main Vac valve opened
5/25/2012	8:55:03 AM	Helium MFC set to  0.000000
5/25/2012	8:55:03 AM	H2 MFC set to  0.000000
5/25/2012	8:55:03 AM	BCl3 MFC set to  0.000000
5/25/2012	8:55:03 AM	PH3 MFC set to  0.000000
5/25/2012	8:55:03 AM	SiCl4 MFC set to  0.000000
5/25/2012	8:55:03 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	8:55:03 AM	Tube furnace set to 150
5/25/2012	10:22:13 AM	Helium valve closed
5/25/2012	10:22:13 AM	H2 valve closed
5/25/2012	10:22:13 AM	BCl3 valve closed
5/25/2012	10:22:13 AM	PH3 valve closed
5/25/2012	10:22:13 AM	SiCl4 pre valve closed
5/25/2012	10:22:13 AM	SiCl4 post valve closed
5/25/2012	10:22:13 AM	Bypass valve closed
5/25/2012	10:22:13 AM	Bubbler valve closed
5/25/2012	10:22:13 AM	Main Vac valve opened
5/25/2012	10:22:13 AM	Helium MFC set to  0.000000
5/25/2012	10:22:13 AM	H2 MFC set to  0.000000
5/25/2012	10:22:13 AM	BCl3 MFC set to  0.000000
5/25/2012	10:22:13 AM	PH3 MFC set to  0.000000
5/25/2012	10:22:13 AM	SiCl4 MFC set to  0.000000
5/25/2012	10:22:13 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:22:14 AM	Tube furnace set to 0
5/25/2012	10:22:15 AM	Run finished at 10:22 AM
5/25/2012	10:25:18 AM	Recipe started at 10:25 AM
5/25/2012	10:25:18 AM	Helium valve closed
5/25/2012	10:25:18 AM	H2 valve closed
5/25/2012	10:25:18 AM	BCl3 valve closed
5/25/2012	10:25:18 AM	PH3 valve closed
5/25/2012	10:25:18 AM	SiCl4 pre valve closed
5/25/2012	10:25:18 AM	SiCl4 post valve closed
5/25/2012	10:25:18 AM	Main Vac valve closed
5/25/2012	10:25:18 AM	Bypass valve closed
5/25/2012	10:25:18 AM	Bubbler valve closed
5/25/2012	10:25:18 AM	Helium MFC set to  0.000000
5/25/2012	10:25:18 AM	H2 MFC set to  0.000000
5/25/2012	10:25:18 AM	BCl3 MFC set to  0.000000
5/25/2012	10:25:18 AM	PH3 MFC set to  0.000000
5/25/2012	10:25:18 AM	SiCl4 MFC set to  0.000000
5/25/2012	10:25:18 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:25:18 AM	Tube furnace set to 0
5/25/2012	10:25:21 AM	Helium valve closed
5/25/2012	10:25:21 AM	BCl3 valve closed
5/25/2012	10:25:21 AM	PH3 valve closed
5/25/2012	10:25:21 AM	SiCl4 pre valve closed
5/25/2012	10:25:21 AM	SiCl4 post valve closed
5/25/2012	10:25:21 AM	Main Vac valve closed
5/25/2012	10:25:21 AM	Bypass valve closed
5/25/2012	10:25:21 AM	Bubbler valve closed
5/25/2012	10:25:21 AM	H2 valve opened
5/25/2012	10:25:21 AM	Helium MFC set to  0.000000
5/25/2012	10:25:21 AM	H2 MFC set to  500.000000
5/25/2012	10:25:21 AM	BCl3 MFC set to  0.000000
5/25/2012	10:25:21 AM	PH3 MFC set to  0.000000
5/25/2012	10:25:21 AM	SiCl4 MFC set to  0.000000
5/25/2012	10:25:21 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:25:21 AM	Tube furnace set to 50
5/25/2012	10:26:33 AM	Helium valve closed
5/25/2012	10:26:33 AM	BCl3 valve closed
5/25/2012	10:26:33 AM	PH3 valve closed
5/25/2012	10:26:33 AM	SiCl4 pre valve closed
5/25/2012	10:26:33 AM	SiCl4 post valve closed
5/25/2012	10:26:33 AM	Main Vac valve closed
5/25/2012	10:26:33 AM	Bypass valve closed
5/25/2012	10:26:33 AM	H2 valve opened
5/25/2012	10:26:33 AM	Bubbler valve opened
5/25/2012	10:26:33 AM	Helium MFC set to  0.000000
5/25/2012	10:26:33 AM	H2 MFC set to  500.000000
5/25/2012	10:26:33 AM	BCl3 MFC set to  0.000000
5/25/2012	10:26:33 AM	PH3 MFC set to  0.000000
5/25/2012	10:26:33 AM	SiCl4 MFC set to  0.000000
5/25/2012	10:26:33 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:26:33 AM	Tube furnace set to 50
5/25/2012	10:26:34 AM	Helium valve closed
5/25/2012	10:26:34 AM	BCl3 valve closed
5/25/2012	10:26:34 AM	PH3 valve closed
5/25/2012	10:26:34 AM	SiCl4 pre valve closed
5/25/2012	10:26:34 AM	SiCl4 post valve closed
5/25/2012	10:26:34 AM	Main Vac valve closed
5/25/2012	10:26:34 AM	Bypass valve closed
5/25/2012	10:26:34 AM	H2 valve opened
5/25/2012	10:26:34 AM	Bubbler valve opened
5/25/2012	10:26:34 AM	Helium MFC set to  0.000000
5/25/2012	10:26:34 AM	H2 MFC set to  500.000000
5/25/2012	10:26:34 AM	BCl3 MFC set to  0.000000
5/25/2012	10:26:34 AM	PH3 MFC set to  0.000000
5/25/2012	10:26:34 AM	SiCl4 MFC set to  0.000000
5/25/2012	10:26:34 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:26:34 AM	Tube furnace set to 1000
5/25/2012	10:46:34 AM	Helium valve closed
5/25/2012	10:46:34 AM	BCl3 valve closed
5/25/2012	10:46:34 AM	Main Vac valve closed
5/25/2012	10:46:34 AM	Bypass valve closed
5/25/2012	10:46:34 AM	H2 valve opened
5/25/2012	10:46:34 AM	PH3 valve opened
5/25/2012	10:46:34 AM	SiCl4 pre valve opened
5/25/2012	10:46:34 AM	SiCl4 post valve opened
5/25/2012	10:46:34 AM	Bubbler valve opened
5/25/2012	10:46:34 AM	Helium MFC set to  0.000000
5/25/2012	10:46:34 AM	H2 MFC set to  500.000000
5/25/2012	10:46:34 AM	BCl3 MFC set to  0.000000
5/25/2012	10:46:35 AM	PH3 MFC set to  0.300000
5/25/2012	10:46:35 AM	SiCl4 MFC set to  50.000000
5/25/2012	10:46:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	10:46:35 AM	Tube furnace set to 1000
5/25/2012	11:06:35 AM	Helium valve closed
5/25/2012	11:06:35 AM	BCl3 valve closed
5/25/2012	11:06:35 AM	PH3 valve closed
5/25/2012	11:06:35 AM	SiCl4 pre valve closed
5/25/2012	11:06:35 AM	SiCl4 post valve closed
5/25/2012	11:06:35 AM	Main Vac valve closed
5/25/2012	11:06:35 AM	Bypass valve closed
5/25/2012	11:06:35 AM	H2 valve opened
5/25/2012	11:06:35 AM	Bubbler valve opened
5/25/2012	11:06:35 AM	Helium MFC set to  0.000000
5/25/2012	11:06:35 AM	H2 MFC set to  500.000000
5/25/2012	11:06:35 AM	BCl3 MFC set to  0.000000
5/25/2012	11:06:35 AM	PH3 MFC set to  0.000000
5/25/2012	11:06:35 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:06:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:06:35 AM	Tube furnace set to 950
5/25/2012	11:09:35 AM	H2 valve closed
5/25/2012	11:09:35 AM	BCl3 valve closed
5/25/2012	11:09:35 AM	PH3 valve closed
5/25/2012	11:09:35 AM	SiCl4 pre valve closed
5/25/2012	11:09:35 AM	SiCl4 post valve closed
5/25/2012	11:09:35 AM	Main Vac valve closed
5/25/2012	11:09:35 AM	Bypass valve closed
5/25/2012	11:09:35 AM	Helium valve opened
5/25/2012	11:09:35 AM	Bubbler valve opened
5/25/2012	11:09:35 AM	Helium MFC set to  500.000000
5/25/2012	11:09:35 AM	H2 MFC set to  0.000000
5/25/2012	11:09:35 AM	BCl3 MFC set to  0.000000
5/25/2012	11:09:35 AM	PH3 MFC set to  0.000000
5/25/2012	11:09:35 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:09:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:09:35 AM	Tube furnace set to 900
5/25/2012	11:12:35 AM	H2 valve closed
5/25/2012	11:12:35 AM	BCl3 valve closed
5/25/2012	11:12:35 AM	PH3 valve closed
5/25/2012	11:12:35 AM	SiCl4 pre valve closed
5/25/2012	11:12:35 AM	SiCl4 post valve closed
5/25/2012	11:12:35 AM	Main Vac valve closed
5/25/2012	11:12:35 AM	Bypass valve closed
5/25/2012	11:12:35 AM	Helium valve opened
5/25/2012	11:12:35 AM	Bubbler valve opened
5/25/2012	11:12:35 AM	Helium MFC set to  500.000000
5/25/2012	11:12:35 AM	H2 MFC set to  0.000000
5/25/2012	11:12:35 AM	BCl3 MFC set to  0.000000
5/25/2012	11:12:35 AM	PH3 MFC set to  0.000000
5/25/2012	11:12:35 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:12:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:12:35 AM	Tube furnace set to 850
5/25/2012	11:15:35 AM	H2 valve closed
5/25/2012	11:15:35 AM	BCl3 valve closed
5/25/2012	11:15:35 AM	PH3 valve closed
5/25/2012	11:15:35 AM	SiCl4 pre valve closed
5/25/2012	11:15:35 AM	SiCl4 post valve closed
5/25/2012	11:15:35 AM	Main Vac valve closed
5/25/2012	11:15:35 AM	Bypass valve closed
5/25/2012	11:15:35 AM	Helium valve opened
5/25/2012	11:15:35 AM	Bubbler valve opened
5/25/2012	11:15:35 AM	Helium MFC set to  500.000000
5/25/2012	11:15:35 AM	H2 MFC set to  0.000000
5/25/2012	11:15:35 AM	BCl3 MFC set to  0.000000
5/25/2012	11:15:35 AM	PH3 MFC set to  0.000000
5/25/2012	11:15:35 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:15:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:15:35 AM	Tube furnace set to 800
5/25/2012	11:18:35 AM	H2 valve closed
5/25/2012	11:18:35 AM	BCl3 valve closed
5/25/2012	11:18:35 AM	PH3 valve closed
5/25/2012	11:18:35 AM	SiCl4 pre valve closed
5/25/2012	11:18:35 AM	SiCl4 post valve closed
5/25/2012	11:18:35 AM	Main Vac valve closed
5/25/2012	11:18:36 AM	Bypass valve closed
5/25/2012	11:18:36 AM	Helium valve opened
5/25/2012	11:18:36 AM	Bubbler valve opened
5/25/2012	11:18:36 AM	Helium MFC set to  500.000000
5/25/2012	11:18:36 AM	H2 MFC set to  0.000000
5/25/2012	11:18:36 AM	BCl3 MFC set to  0.000000
5/25/2012	11:18:36 AM	PH3 MFC set to  0.000000
5/25/2012	11:18:36 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:18:36 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:18:36 AM	Tube furnace set to 750
5/25/2012	11:21:36 AM	H2 valve closed
5/25/2012	11:21:36 AM	BCl3 valve closed
5/25/2012	11:21:36 AM	PH3 valve closed
5/25/2012	11:21:36 AM	SiCl4 pre valve closed
5/25/2012	11:21:36 AM	SiCl4 post valve closed
5/25/2012	11:21:36 AM	Main Vac valve closed
5/25/2012	11:21:36 AM	Bypass valve closed
5/25/2012	11:21:36 AM	Helium valve opened
5/25/2012	11:21:36 AM	Bubbler valve opened
5/25/2012	11:21:36 AM	Helium MFC set to  500.000000
5/25/2012	11:21:36 AM	H2 MFC set to  0.000000
5/25/2012	11:21:36 AM	BCl3 MFC set to  0.000000
5/25/2012	11:21:36 AM	PH3 MFC set to  0.000000
5/25/2012	11:21:36 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:21:36 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:21:36 AM	Tube furnace set to 0
5/25/2012	11:32:13 AM	Run aborted at 11:32 AM
5/25/2012	11:32:13 AM	Helium valve closed
5/25/2012	11:32:13 AM	H2 valve closed
5/25/2012	11:32:13 AM	BCl3 valve closed
5/25/2012	11:32:13 AM	PH3 valve closed
5/25/2012	11:32:13 AM	SiCl4 pre valve closed
5/25/2012	11:32:13 AM	SiCl4 post valve closed
5/25/2012	11:32:13 AM	Bypass valve closed
5/25/2012	11:32:13 AM	Main Vac valve closed
5/25/2012	11:32:13 AM	Bubbler valve closed
5/25/2012	11:32:13 AM	Helium MFC set to  0.000000
5/25/2012	11:32:13 AM	H2 MFC set to  0.000000
5/25/2012	11:32:13 AM	BCl3 MFC set to  0.000000
5/25/2012	11:32:13 AM	PH3 MFC set to  0.000000
5/25/2012	11:32:13 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:32:13 AM	Tube furnace set to 0
5/25/2012	11:32:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	11:32:17 AM	Recipe started at 11:32 AM
5/25/2012	11:32:17 AM	Helium valve closed
5/25/2012	11:32:17 AM	H2 valve closed
5/25/2012	11:32:17 AM	BCl3 valve closed
5/25/2012	11:32:17 AM	PH3 valve closed
5/25/2012	11:32:17 AM	SiCl4 pre valve closed
5/25/2012	11:32:17 AM	SiCl4 post valve closed
5/25/2012	11:32:17 AM	Main Vac valve closed
5/25/2012	11:32:17 AM	Bypass valve closed
5/25/2012	11:32:17 AM	Bubbler valve closed
5/25/2012	11:32:17 AM	Helium MFC set to  0.000000
5/25/2012	11:32:17 AM	H2 MFC set to  0.000000
5/25/2012	11:32:17 AM	BCl3 MFC set to  0.000000
5/25/2012	11:32:17 AM	PH3 MFC set to  0.000000
5/25/2012	11:32:17 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:32:17 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:32:17 AM	Tube furnace set to 0
5/25/2012	11:32:20 AM	H2 valve closed
5/25/2012	11:32:20 AM	BCl3 valve closed
5/25/2012	11:32:20 AM	PH3 valve closed
5/25/2012	11:32:20 AM	SiCl4 pre valve closed
5/25/2012	11:32:20 AM	SiCl4 post valve closed
5/25/2012	11:32:20 AM	Main Vac valve closed
5/25/2012	11:32:20 AM	Bypass valve closed
5/25/2012	11:32:20 AM	Bubbler valve closed
5/25/2012	11:32:20 AM	Helium valve opened
5/25/2012	11:32:20 AM	Helium MFC set to  500.000000
5/25/2012	11:32:20 AM	H2 MFC set to  0.000000
5/25/2012	11:32:20 AM	BCl3 MFC set to  0.000000
5/25/2012	11:32:20 AM	PH3 MFC set to  0.000000
5/25/2012	11:32:20 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:32:20 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:32:20 AM	Tube furnace set to 0
5/25/2012	11:32:21 AM	Helium valve closed
5/25/2012	11:32:21 AM	H2 valve closed
5/25/2012	11:32:21 AM	BCl3 valve closed
5/25/2012	11:32:21 AM	PH3 valve closed
5/25/2012	11:32:21 AM	SiCl4 pre valve closed
5/25/2012	11:32:21 AM	SiCl4 post valve closed
5/25/2012	11:32:21 AM	Main Vac valve closed
5/25/2012	11:32:21 AM	Bypass valve closed
5/25/2012	11:32:21 AM	Bubbler valve closed
5/25/2012	11:32:21 AM	Helium MFC set to  0.000000
5/25/2012	11:32:21 AM	H2 MFC set to  0.000000
5/25/2012	11:32:21 AM	BCl3 MFC set to  0.000000
5/25/2012	11:32:21 AM	PH3 MFC set to  0.000000
5/25/2012	11:32:21 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:32:21 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:32:21 AM	Tube furnace set to 0
5/25/2012	11:32:22 AM	Run finished at 11:32 AM
5/25/2012	11:32:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	11:36:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	11:36:51 AM	Recipe started at 11:36 AM
5/25/2012	11:36:51 AM	Helium valve closed
5/25/2012	11:36:51 AM	H2 valve closed
5/25/2012	11:36:51 AM	BCl3 valve closed
5/25/2012	11:36:51 AM	PH3 valve closed
5/25/2012	11:36:51 AM	SiCl4 pre valve closed
5/25/2012	11:36:51 AM	SiCl4 post valve closed
5/25/2012	11:36:51 AM	Main Vac valve closed
5/25/2012	11:36:51 AM	Bubbler valve closed
5/25/2012	11:36:51 AM	Bypass valve opened
5/25/2012	11:36:51 AM	Helium MFC set to  0.000000
5/25/2012	11:36:51 AM	H2 MFC set to  0.000000
5/25/2012	11:36:51 AM	BCl3 MFC set to  0.000000
5/25/2012	11:36:51 AM	PH3 MFC set to  0.000000
5/25/2012	11:36:51 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:36:51 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:36:52 AM	Tube furnace set to 0
5/25/2012	11:37:57 AM	Helium valve closed
5/25/2012	11:37:57 AM	H2 valve closed
5/25/2012	11:37:57 AM	BCl3 valve closed
5/25/2012	11:37:57 AM	PH3 valve closed
5/25/2012	11:37:57 AM	SiCl4 pre valve closed
5/25/2012	11:37:57 AM	SiCl4 post valve closed
5/25/2012	11:37:57 AM	Main Vac valve closed
5/25/2012	11:37:57 AM	Bubbler valve closed
5/25/2012	11:37:57 AM	Bypass valve opened
5/25/2012	11:37:57 AM	Helium MFC set to  0.000000
5/25/2012	11:37:57 AM	H2 MFC set to  0.000000
5/25/2012	11:37:57 AM	BCl3 MFC set to  0.000000
5/25/2012	11:37:57 AM	PH3 MFC set to  0.000000
5/25/2012	11:37:57 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:37:57 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:37:57 AM	Tube furnace set to 0
5/25/2012	11:38:57 AM	Helium valve closed
5/25/2012	11:38:57 AM	H2 valve closed
5/25/2012	11:38:57 AM	BCl3 valve closed
5/25/2012	11:38:57 AM	PH3 valve closed
5/25/2012	11:38:57 AM	SiCl4 pre valve closed
5/25/2012	11:38:57 AM	SiCl4 post valve closed
5/25/2012	11:38:57 AM	Bypass valve closed
5/25/2012	11:38:57 AM	Bubbler valve closed
5/25/2012	11:38:57 AM	Main Vac valve opened
5/25/2012	11:38:57 AM	Helium MFC set to  0.000000
5/25/2012	11:38:57 AM	H2 MFC set to  0.000000
5/25/2012	11:38:57 AM	BCl3 MFC set to  0.000000
5/25/2012	11:38:57 AM	PH3 MFC set to  0.000000
5/25/2012	11:38:57 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:38:57 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:38:57 AM	Tube furnace set to 0
5/25/2012	11:38:58 AM	Run finished at 11:38 AM
5/25/2012	11:38:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	11:39:37 AM	Recipe started at 11:39 AM
5/25/2012	11:39:38 AM	Helium valve closed
5/25/2012	11:39:38 AM	H2 valve closed
5/25/2012	11:39:38 AM	BCl3 valve closed
5/25/2012	11:39:38 AM	PH3 valve closed
5/25/2012	11:39:38 AM	SiCl4 pre valve closed
5/25/2012	11:39:38 AM	SiCl4 post valve closed
5/25/2012	11:39:38 AM	Main Vac valve closed
5/25/2012	11:39:38 AM	Bypass valve closed
5/25/2012	11:39:38 AM	Bubbler valve closed
5/25/2012	11:39:38 AM	Helium MFC set to  0.000000
5/25/2012	11:39:38 AM	H2 MFC set to  0.000000
5/25/2012	11:39:38 AM	BCl3 MFC set to  0.000000
5/25/2012	11:39:38 AM	PH3 MFC set to  0.000000
5/25/2012	11:39:38 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:39:38 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:39:38 AM	Tube furnace set to 0
5/25/2012	11:39:41 AM	Helium valve closed
5/25/2012	11:39:41 AM	H2 valve closed
5/25/2012	11:39:41 AM	BCl3 valve closed
5/25/2012	11:39:41 AM	PH3 valve closed
5/25/2012	11:39:41 AM	SiCl4 pre valve closed
5/25/2012	11:39:41 AM	SiCl4 post valve closed
5/25/2012	11:39:41 AM	Main Vac valve closed
5/25/2012	11:39:41 AM	Bubbler valve closed
5/25/2012	11:39:41 AM	Bypass valve opened
5/25/2012	11:39:41 AM	Helium MFC set to  0.000000
5/25/2012	11:39:41 AM	H2 MFC set to  0.000000
5/25/2012	11:39:41 AM	BCl3 MFC set to  0.000000
5/25/2012	11:39:41 AM	PH3 MFC set to  0.000000
5/25/2012	11:39:41 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:39:41 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:39:41 AM	Tube furnace set to 0
5/25/2012	11:39:41 AM	Helium valve closed
5/25/2012	11:39:41 AM	H2 valve closed
5/25/2012	11:39:41 AM	BCl3 valve closed
5/25/2012	11:39:41 AM	PH3 valve closed
5/25/2012	11:39:41 AM	SiCl4 pre valve closed
5/25/2012	11:39:41 AM	SiCl4 post valve closed
5/25/2012	11:39:41 AM	Main Vac valve closed
5/25/2012	11:39:41 AM	Bubbler valve closed
5/25/2012	11:39:41 AM	Bypass valve opened
5/25/2012	11:39:41 AM	Helium MFC set to  0.000000
5/25/2012	11:39:41 AM	H2 MFC set to  0.000000
5/25/2012	11:39:41 AM	BCl3 MFC set to  0.000000
5/25/2012	11:39:41 AM	PH3 MFC set to  0.000000
5/25/2012	11:39:41 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:39:41 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:39:41 AM	Tube furnace set to 0
5/25/2012	11:39:43 AM	Helium valve closed
5/25/2012	11:39:43 AM	H2 valve closed
5/25/2012	11:39:43 AM	BCl3 valve closed
5/25/2012	11:39:43 AM	PH3 valve closed
5/25/2012	11:39:43 AM	SiCl4 pre valve closed
5/25/2012	11:39:43 AM	SiCl4 post valve closed
5/25/2012	11:39:43 AM	Bypass valve closed
5/25/2012	11:39:43 AM	Bubbler valve closed
5/25/2012	11:39:43 AM	Main Vac valve opened
5/25/2012	11:39:43 AM	Helium MFC set to  0.000000
5/25/2012	11:39:43 AM	H2 MFC set to  0.000000
5/25/2012	11:39:43 AM	BCl3 MFC set to  0.000000
5/25/2012	11:39:43 AM	PH3 MFC set to  0.000000
5/25/2012	11:39:43 AM	SiCl4 MFC set to  0.000000
5/25/2012	11:39:43 AM	Bypass solenoid MFC set to  0.000000
5/25/2012	11:39:43 AM	Tube furnace set to 150
5/25/2012	1:32:02 PM	Helium valve closed
5/25/2012	1:32:02 PM	H2 valve closed
5/25/2012	1:32:02 PM	BCl3 valve closed
5/25/2012	1:32:02 PM	PH3 valve closed
5/25/2012	1:32:02 PM	SiCl4 pre valve closed
5/25/2012	1:32:02 PM	SiCl4 post valve closed
5/25/2012	1:32:02 PM	Bypass valve closed
5/25/2012	1:32:02 PM	Bubbler valve closed
5/25/2012	1:32:02 PM	Main Vac valve opened
5/25/2012	1:32:02 PM	Helium MFC set to  0.000000
5/25/2012	1:32:02 PM	H2 MFC set to  0.000000
5/25/2012	1:32:02 PM	BCl3 MFC set to  0.000000
5/25/2012	1:32:02 PM	PH3 MFC set to  0.000000
5/25/2012	1:32:02 PM	SiCl4 MFC set to  0.000000
5/25/2012	1:32:02 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:32:03 PM	Tube furnace set to 0
5/25/2012	1:32:04 PM	Run finished at 1:32 PM
5/25/2012	1:33:02 PM	Recipe started at 1:32 PM
5/25/2012	1:33:02 PM	Helium valve closed
5/25/2012	1:33:02 PM	H2 valve closed
5/25/2012	1:33:02 PM	BCl3 valve closed
5/25/2012	1:33:02 PM	PH3 valve closed
5/25/2012	1:33:02 PM	SiCl4 pre valve closed
5/25/2012	1:33:02 PM	SiCl4 post valve closed
5/25/2012	1:33:02 PM	Main Vac valve closed
5/25/2012	1:33:02 PM	Bypass valve closed
5/25/2012	1:33:02 PM	Bubbler valve closed
5/25/2012	1:33:02 PM	Helium MFC set to  0.000000
5/25/2012	1:33:02 PM	H2 MFC set to  0.000000
5/25/2012	1:33:02 PM	BCl3 MFC set to  0.000000
5/25/2012	1:33:02 PM	PH3 MFC set to  0.000000
5/25/2012	1:33:02 PM	SiCl4 MFC set to  0.000000
5/25/2012	1:33:02 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:33:02 PM	Tube furnace set to 0
5/25/2012	1:33:05 PM	Helium valve closed
5/25/2012	1:33:05 PM	BCl3 valve closed
5/25/2012	1:33:05 PM	PH3 valve closed
5/25/2012	1:33:05 PM	SiCl4 pre valve closed
5/25/2012	1:33:05 PM	SiCl4 post valve closed
5/25/2012	1:33:05 PM	Main Vac valve closed
5/25/2012	1:33:05 PM	Bypass valve closed
5/25/2012	1:33:05 PM	Bubbler valve closed
5/25/2012	1:33:05 PM	H2 valve opened
5/25/2012	1:33:05 PM	Helium MFC set to  0.000000
5/25/2012	1:33:05 PM	H2 MFC set to  500.000000
5/25/2012	1:33:05 PM	BCl3 MFC set to  0.000000
5/25/2012	1:33:05 PM	PH3 MFC set to  0.000000
5/25/2012	1:33:05 PM	SiCl4 MFC set to  0.000000
5/25/2012	1:33:05 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:33:05 PM	Tube furnace set to 50
5/25/2012	1:34:17 PM	Helium valve closed
5/25/2012	1:34:17 PM	BCl3 valve closed
5/25/2012	1:34:17 PM	PH3 valve closed
5/25/2012	1:34:17 PM	SiCl4 pre valve closed
5/25/2012	1:34:17 PM	SiCl4 post valve closed
5/25/2012	1:34:17 PM	Main Vac valve closed
5/25/2012	1:34:17 PM	Bypass valve closed
5/25/2012	1:34:17 PM	H2 valve opened
5/25/2012	1:34:17 PM	Bubbler valve opened
5/25/2012	1:34:17 PM	Helium MFC set to  0.000000
5/25/2012	1:34:17 PM	H2 MFC set to  500.000000
5/25/2012	1:34:17 PM	BCl3 MFC set to  0.000000
5/25/2012	1:34:17 PM	PH3 MFC set to  0.000000
5/25/2012	1:34:17 PM	SiCl4 MFC set to  0.000000
5/25/2012	1:34:17 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:34:17 PM	Tube furnace set to 50
5/25/2012	1:34:18 PM	Helium valve closed
5/25/2012	1:34:19 PM	BCl3 valve closed
5/25/2012	1:34:19 PM	PH3 valve closed
5/25/2012	1:34:19 PM	SiCl4 pre valve closed
5/25/2012	1:34:19 PM	SiCl4 post valve closed
5/25/2012	1:34:19 PM	Main Vac valve closed
5/25/2012	1:34:19 PM	Bypass valve closed
5/25/2012	1:34:19 PM	H2 valve opened
5/25/2012	1:34:19 PM	Bubbler valve opened
5/25/2012	1:34:19 PM	Helium MFC set to  0.000000
5/25/2012	1:34:19 PM	H2 MFC set to  500.000000
5/25/2012	1:34:19 PM	BCl3 MFC set to  0.000000
5/25/2012	1:34:19 PM	PH3 MFC set to  0.000000
5/25/2012	1:34:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	1:34:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:34:19 PM	Tube furnace set to 1000
5/25/2012	1:54:19 PM	Helium valve closed
5/25/2012	1:54:19 PM	BCl3 valve closed
5/25/2012	1:54:19 PM	Main Vac valve closed
5/25/2012	1:54:19 PM	Bypass valve closed
5/25/2012	1:54:19 PM	H2 valve opened
5/25/2012	1:54:19 PM	PH3 valve opened
5/25/2012	1:54:19 PM	SiCl4 pre valve opened
5/25/2012	1:54:19 PM	SiCl4 post valve opened
5/25/2012	1:54:19 PM	Bubbler valve opened
5/25/2012	1:54:19 PM	Helium MFC set to  0.000000
5/25/2012	1:54:19 PM	H2 MFC set to  500.000000
5/25/2012	1:54:19 PM	BCl3 MFC set to  0.000000
5/25/2012	1:54:19 PM	PH3 MFC set to  0.300000
5/25/2012	1:54:19 PM	SiCl4 MFC set to  50.000000
5/25/2012	1:54:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	1:54:19 PM	Tube furnace set to 1000
5/25/2012	2:14:19 PM	Helium valve closed
5/25/2012	2:14:19 PM	BCl3 valve closed
5/25/2012	2:14:19 PM	PH3 valve closed
5/25/2012	2:14:19 PM	SiCl4 pre valve closed
5/25/2012	2:14:19 PM	SiCl4 post valve closed
5/25/2012	2:14:19 PM	Main Vac valve closed
5/25/2012	2:14:19 PM	Bypass valve closed
5/25/2012	2:14:19 PM	H2 valve opened
5/25/2012	2:14:19 PM	Bubbler valve opened
5/25/2012	2:14:19 PM	Helium MFC set to  0.000000
5/25/2012	2:14:19 PM	H2 MFC set to  500.000000
5/25/2012	2:14:19 PM	BCl3 MFC set to  0.000000
5/25/2012	2:14:19 PM	PH3 MFC set to  0.000000
5/25/2012	2:14:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:14:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:14:19 PM	Tube furnace set to 950
5/25/2012	2:17:19 PM	H2 valve closed
5/25/2012	2:17:19 PM	BCl3 valve closed
5/25/2012	2:17:19 PM	PH3 valve closed
5/25/2012	2:17:19 PM	SiCl4 pre valve closed
5/25/2012	2:17:19 PM	SiCl4 post valve closed
5/25/2012	2:17:19 PM	Main Vac valve closed
5/25/2012	2:17:19 PM	Bypass valve closed
5/25/2012	2:17:19 PM	Helium valve opened
5/25/2012	2:17:19 PM	Bubbler valve opened
5/25/2012	2:17:19 PM	Helium MFC set to  500.000000
5/25/2012	2:17:19 PM	H2 MFC set to  0.000000
5/25/2012	2:17:19 PM	BCl3 MFC set to  0.000000
5/25/2012	2:17:19 PM	PH3 MFC set to  0.000000
5/25/2012	2:17:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:17:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:17:19 PM	Tube furnace set to 900
5/25/2012	2:20:19 PM	H2 valve closed
5/25/2012	2:20:19 PM	BCl3 valve closed
5/25/2012	2:20:19 PM	PH3 valve closed
5/25/2012	2:20:19 PM	SiCl4 pre valve closed
5/25/2012	2:20:19 PM	SiCl4 post valve closed
5/25/2012	2:20:19 PM	Main Vac valve closed
5/25/2012	2:20:19 PM	Bypass valve closed
5/25/2012	2:20:19 PM	Helium valve opened
5/25/2012	2:20:19 PM	Bubbler valve opened
5/25/2012	2:20:19 PM	Helium MFC set to  500.000000
5/25/2012	2:20:19 PM	H2 MFC set to  0.000000
5/25/2012	2:20:19 PM	BCl3 MFC set to  0.000000
5/25/2012	2:20:19 PM	PH3 MFC set to  0.000000
5/25/2012	2:20:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:20:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:20:20 PM	Tube furnace set to 850
5/25/2012	2:23:20 PM	H2 valve closed
5/25/2012	2:23:20 PM	BCl3 valve closed
5/25/2012	2:23:20 PM	PH3 valve closed
5/25/2012	2:23:20 PM	SiCl4 pre valve closed
5/25/2012	2:23:20 PM	SiCl4 post valve closed
5/25/2012	2:23:20 PM	Main Vac valve closed
5/25/2012	2:23:20 PM	Bypass valve closed
5/25/2012	2:23:20 PM	Helium valve opened
5/25/2012	2:23:20 PM	Bubbler valve opened
5/25/2012	2:23:20 PM	Helium MFC set to  500.000000
5/25/2012	2:23:20 PM	H2 MFC set to  0.000000
5/25/2012	2:23:20 PM	BCl3 MFC set to  0.000000
5/25/2012	2:23:20 PM	PH3 MFC set to  0.000000
5/25/2012	2:23:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:23:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:23:20 PM	Tube furnace set to 800
5/25/2012	2:26:20 PM	H2 valve closed
5/25/2012	2:26:20 PM	BCl3 valve closed
5/25/2012	2:26:20 PM	PH3 valve closed
5/25/2012	2:26:20 PM	SiCl4 pre valve closed
5/25/2012	2:26:20 PM	SiCl4 post valve closed
5/25/2012	2:26:20 PM	Main Vac valve closed
5/25/2012	2:26:20 PM	Bypass valve closed
5/25/2012	2:26:20 PM	Helium valve opened
5/25/2012	2:26:20 PM	Bubbler valve opened
5/25/2012	2:26:20 PM	Helium MFC set to  500.000000
5/25/2012	2:26:20 PM	H2 MFC set to  0.000000
5/25/2012	2:26:20 PM	BCl3 MFC set to  0.000000
5/25/2012	2:26:20 PM	PH3 MFC set to  0.000000
5/25/2012	2:26:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:26:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:26:20 PM	Tube furnace set to 750
5/25/2012	2:29:20 PM	H2 valve closed
5/25/2012	2:29:20 PM	BCl3 valve closed
5/25/2012	2:29:20 PM	PH3 valve closed
5/25/2012	2:29:20 PM	SiCl4 pre valve closed
5/25/2012	2:29:20 PM	SiCl4 post valve closed
5/25/2012	2:29:20 PM	Main Vac valve closed
5/25/2012	2:29:20 PM	Bypass valve closed
5/25/2012	2:29:20 PM	Helium valve opened
5/25/2012	2:29:20 PM	Bubbler valve opened
5/25/2012	2:29:20 PM	Helium MFC set to  500.000000
5/25/2012	2:29:20 PM	H2 MFC set to  0.000000
5/25/2012	2:29:20 PM	BCl3 MFC set to  0.000000
5/25/2012	2:29:20 PM	PH3 MFC set to  0.000000
5/25/2012	2:29:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:29:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:29:20 PM	Tube furnace set to 0
5/25/2012	2:37:09 PM	Run aborted at 2:37 PM
5/25/2012	2:37:09 PM	Helium valve closed
5/25/2012	2:37:09 PM	H2 valve closed
5/25/2012	2:37:09 PM	BCl3 valve closed
5/25/2012	2:37:09 PM	PH3 valve closed
5/25/2012	2:37:09 PM	SiCl4 pre valve closed
5/25/2012	2:37:09 PM	SiCl4 post valve closed
5/25/2012	2:37:09 PM	Bypass valve closed
5/25/2012	2:37:09 PM	Main Vac valve closed
5/25/2012	2:37:09 PM	Bubbler valve closed
5/25/2012	2:37:09 PM	Helium MFC set to  0.000000
5/25/2012	2:37:09 PM	H2 MFC set to  0.000000
5/25/2012	2:37:09 PM	BCl3 MFC set to  0.000000
5/25/2012	2:37:09 PM	PH3 MFC set to  0.000000
5/25/2012	2:37:09 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:37:10 PM	Tube furnace set to 0
5/25/2012	2:37:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	2:37:21 PM	Recipe started at 2:37 PM
5/25/2012	2:37:21 PM	Helium valve closed
5/25/2012	2:37:21 PM	H2 valve closed
5/25/2012	2:37:21 PM	BCl3 valve closed
5/25/2012	2:37:21 PM	PH3 valve closed
5/25/2012	2:37:21 PM	SiCl4 pre valve closed
5/25/2012	2:37:21 PM	SiCl4 post valve closed
5/25/2012	2:37:21 PM	Main Vac valve closed
5/25/2012	2:37:21 PM	Bypass valve closed
5/25/2012	2:37:21 PM	Bubbler valve closed
5/25/2012	2:37:21 PM	Helium MFC set to  0.000000
5/25/2012	2:37:21 PM	H2 MFC set to  0.000000
5/25/2012	2:37:21 PM	BCl3 MFC set to  0.000000
5/25/2012	2:37:21 PM	PH3 MFC set to  0.000000
5/25/2012	2:37:21 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:37:21 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:37:22 PM	Tube furnace set to 0
5/25/2012	2:37:25 PM	H2 valve closed
5/25/2012	2:37:25 PM	BCl3 valve closed
5/25/2012	2:37:25 PM	PH3 valve closed
5/25/2012	2:37:25 PM	SiCl4 pre valve closed
5/25/2012	2:37:25 PM	SiCl4 post valve closed
5/25/2012	2:37:25 PM	Main Vac valve closed
5/25/2012	2:37:25 PM	Bypass valve closed
5/25/2012	2:37:25 PM	Bubbler valve closed
5/25/2012	2:37:25 PM	Helium valve opened
5/25/2012	2:37:25 PM	Helium MFC set to  500.000000
5/25/2012	2:37:25 PM	H2 MFC set to  0.000000
5/25/2012	2:37:25 PM	BCl3 MFC set to  0.000000
5/25/2012	2:37:25 PM	PH3 MFC set to  0.000000
5/25/2012	2:37:25 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:37:25 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:37:25 PM	Tube furnace set to 0
5/25/2012	2:37:25 PM	Helium valve closed
5/25/2012	2:37:25 PM	H2 valve closed
5/25/2012	2:37:25 PM	BCl3 valve closed
5/25/2012	2:37:25 PM	PH3 valve closed
5/25/2012	2:37:25 PM	SiCl4 pre valve closed
5/25/2012	2:37:25 PM	SiCl4 post valve closed
5/25/2012	2:37:25 PM	Main Vac valve closed
5/25/2012	2:37:25 PM	Bypass valve closed
5/25/2012	2:37:25 PM	Bubbler valve closed
5/25/2012	2:37:25 PM	Helium MFC set to  0.000000
5/25/2012	2:37:25 PM	H2 MFC set to  0.000000
5/25/2012	2:37:25 PM	BCl3 MFC set to  0.000000
5/25/2012	2:37:25 PM	PH3 MFC set to  0.000000
5/25/2012	2:37:25 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:37:25 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:37:25 PM	Tube furnace set to 0
5/25/2012	2:37:26 PM	Run finished at 2:37 PM
5/25/2012	2:37:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	2:44:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	2:44:41 PM	Recipe started at 2:44 PM
5/25/2012	2:44:41 PM	Helium valve closed
5/25/2012	2:44:41 PM	H2 valve closed
5/25/2012	2:44:41 PM	BCl3 valve closed
5/25/2012	2:44:41 PM	PH3 valve closed
5/25/2012	2:44:41 PM	SiCl4 pre valve closed
5/25/2012	2:44:41 PM	SiCl4 post valve closed
5/25/2012	2:44:41 PM	Main Vac valve closed
5/25/2012	2:44:41 PM	Bubbler valve closed
5/25/2012	2:44:41 PM	Bypass valve opened
5/25/2012	2:44:41 PM	Helium MFC set to  0.000000
5/25/2012	2:44:41 PM	H2 MFC set to  0.000000
5/25/2012	2:44:41 PM	BCl3 MFC set to  0.000000
5/25/2012	2:44:41 PM	PH3 MFC set to  0.000000
5/25/2012	2:44:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:44:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:44:41 PM	Tube furnace set to 0
5/25/2012	2:45:49 PM	Helium valve closed
5/25/2012	2:45:49 PM	H2 valve closed
5/25/2012	2:45:49 PM	BCl3 valve closed
5/25/2012	2:45:49 PM	PH3 valve closed
5/25/2012	2:45:49 PM	SiCl4 pre valve closed
5/25/2012	2:45:49 PM	SiCl4 post valve closed
5/25/2012	2:45:49 PM	Main Vac valve closed
5/25/2012	2:45:49 PM	Bubbler valve closed
5/25/2012	2:45:49 PM	Bypass valve opened
5/25/2012	2:45:49 PM	Helium MFC set to  0.000000
5/25/2012	2:45:49 PM	H2 MFC set to  0.000000
5/25/2012	2:45:49 PM	BCl3 MFC set to  0.000000
5/25/2012	2:45:49 PM	PH3 MFC set to  0.000000
5/25/2012	2:45:49 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:45:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:45:49 PM	Tube furnace set to 0
5/25/2012	2:46:49 PM	Helium valve closed
5/25/2012	2:46:49 PM	H2 valve closed
5/25/2012	2:46:49 PM	BCl3 valve closed
5/25/2012	2:46:49 PM	PH3 valve closed
5/25/2012	2:46:49 PM	SiCl4 pre valve closed
5/25/2012	2:46:49 PM	SiCl4 post valve closed
5/25/2012	2:46:49 PM	Bypass valve closed
5/25/2012	2:46:49 PM	Bubbler valve closed
5/25/2012	2:46:49 PM	Main Vac valve opened
5/25/2012	2:46:49 PM	Helium MFC set to  0.000000
5/25/2012	2:46:49 PM	H2 MFC set to  0.000000
5/25/2012	2:46:49 PM	BCl3 MFC set to  0.000000
5/25/2012	2:46:49 PM	PH3 MFC set to  0.000000
5/25/2012	2:46:49 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:46:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:46:49 PM	Tube furnace set to 0
5/25/2012	2:46:50 PM	Run finished at 2:46 PM
5/25/2012	2:46:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	2:47:02 PM	Recipe started at 2:47 PM
5/25/2012	2:47:02 PM	Helium valve closed
5/25/2012	2:47:02 PM	H2 valve closed
5/25/2012	2:47:02 PM	BCl3 valve closed
5/25/2012	2:47:02 PM	PH3 valve closed
5/25/2012	2:47:02 PM	SiCl4 pre valve closed
5/25/2012	2:47:02 PM	SiCl4 post valve closed
5/25/2012	2:47:02 PM	Main Vac valve closed
5/25/2012	2:47:02 PM	Bypass valve closed
5/25/2012	2:47:02 PM	Bubbler valve closed
5/25/2012	2:47:02 PM	Helium MFC set to  0.000000
5/25/2012	2:47:02 PM	H2 MFC set to  0.000000
5/25/2012	2:47:02 PM	BCl3 MFC set to  0.000000
5/25/2012	2:47:02 PM	PH3 MFC set to  0.000000
5/25/2012	2:47:02 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:47:02 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:47:02 PM	Tube furnace set to 0
5/25/2012	2:47:05 PM	Helium valve closed
5/25/2012	2:47:05 PM	H2 valve closed
5/25/2012	2:47:05 PM	BCl3 valve closed
5/25/2012	2:47:05 PM	PH3 valve closed
5/25/2012	2:47:05 PM	SiCl4 pre valve closed
5/25/2012	2:47:05 PM	SiCl4 post valve closed
5/25/2012	2:47:05 PM	Main Vac valve closed
5/25/2012	2:47:05 PM	Bubbler valve closed
5/25/2012	2:47:05 PM	Bypass valve opened
5/25/2012	2:47:05 PM	Helium MFC set to  0.000000
5/25/2012	2:47:05 PM	H2 MFC set to  0.000000
5/25/2012	2:47:05 PM	BCl3 MFC set to  0.000000
5/25/2012	2:47:05 PM	PH3 MFC set to  0.000000
5/25/2012	2:47:05 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:47:05 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:47:05 PM	Tube furnace set to 0
5/25/2012	2:47:05 PM	Helium valve closed
5/25/2012	2:47:05 PM	H2 valve closed
5/25/2012	2:47:05 PM	BCl3 valve closed
5/25/2012	2:47:05 PM	PH3 valve closed
5/25/2012	2:47:05 PM	SiCl4 pre valve closed
5/25/2012	2:47:05 PM	SiCl4 post valve closed
5/25/2012	2:47:05 PM	Main Vac valve closed
5/25/2012	2:47:05 PM	Bubbler valve closed
5/25/2012	2:47:05 PM	Bypass valve opened
5/25/2012	2:47:05 PM	Helium MFC set to  0.000000
5/25/2012	2:47:05 PM	H2 MFC set to  0.000000
5/25/2012	2:47:05 PM	BCl3 MFC set to  0.000000
5/25/2012	2:47:05 PM	PH3 MFC set to  0.000000
5/25/2012	2:47:05 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:47:05 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:47:06 PM	Tube furnace set to 0
5/25/2012	2:47:14 PM	Helium valve closed
5/25/2012	2:47:14 PM	H2 valve closed
5/25/2012	2:47:14 PM	BCl3 valve closed
5/25/2012	2:47:14 PM	PH3 valve closed
5/25/2012	2:47:14 PM	SiCl4 pre valve closed
5/25/2012	2:47:14 PM	SiCl4 post valve closed
5/25/2012	2:47:14 PM	Bypass valve closed
5/25/2012	2:47:14 PM	Bubbler valve closed
5/25/2012	2:47:14 PM	Main Vac valve opened
5/25/2012	2:47:14 PM	Helium MFC set to  0.000000
5/25/2012	2:47:14 PM	H2 MFC set to  0.000000
5/25/2012	2:47:14 PM	BCl3 MFC set to  0.000000
5/25/2012	2:47:14 PM	PH3 MFC set to  0.000000
5/25/2012	2:47:14 PM	SiCl4 MFC set to  0.000000
5/25/2012	2:47:14 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	2:47:14 PM	Tube furnace set to 150
5/25/2012	3:01:19 PM	Run aborted at 3:01 PM
5/25/2012	3:01:19 PM	Helium valve closed
5/25/2012	3:01:19 PM	H2 valve closed
5/25/2012	3:01:19 PM	BCl3 valve closed
5/25/2012	3:01:19 PM	PH3 valve closed
5/25/2012	3:01:19 PM	SiCl4 pre valve closed
5/25/2012	3:01:19 PM	SiCl4 post valve closed
5/25/2012	3:01:19 PM	Bypass valve closed
5/25/2012	3:01:19 PM	Main Vac valve closed
5/25/2012	3:01:19 PM	Bubbler valve closed
5/25/2012	3:01:19 PM	Helium MFC set to  0.000000
5/25/2012	3:01:19 PM	H2 MFC set to  0.000000
5/25/2012	3:01:19 PM	BCl3 MFC set to  0.000000
5/25/2012	3:01:19 PM	PH3 MFC set to  0.000000
5/25/2012	3:01:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:01:19 PM	Tube furnace set to 0
5/25/2012	3:01:22 PM	Main Vac valve opened
5/25/2012	3:01:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/25/2012	3:01:46 PM	Recipe started at 3:01 PM
5/25/2012	3:01:46 PM	Helium valve closed
5/25/2012	3:01:46 PM	H2 valve closed
5/25/2012	3:01:46 PM	BCl3 valve closed
5/25/2012	3:01:46 PM	PH3 valve closed
5/25/2012	3:01:46 PM	SiCl4 pre valve closed
5/25/2012	3:01:46 PM	SiCl4 post valve closed
5/25/2012	3:01:46 PM	Main Vac valve closed
5/25/2012	3:01:46 PM	Bubbler valve closed
5/25/2012	3:01:46 PM	Bypass valve opened
5/25/2012	3:01:46 PM	Helium MFC set to  0.000000
5/25/2012	3:01:46 PM	H2 MFC set to  0.000000
5/25/2012	3:01:46 PM	BCl3 MFC set to  0.000000
5/25/2012	3:01:46 PM	PH3 MFC set to  0.000000
5/25/2012	3:01:46 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:01:46 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:01:46 PM	Tube furnace set to 0
5/25/2012	3:01:47 PM	Helium valve closed
5/25/2012	3:01:47 PM	H2 valve closed
5/25/2012	3:01:47 PM	BCl3 valve closed
5/25/2012	3:01:47 PM	PH3 valve closed
5/25/2012	3:01:47 PM	SiCl4 pre valve closed
5/25/2012	3:01:47 PM	SiCl4 post valve closed
5/25/2012	3:01:47 PM	Main Vac valve closed
5/25/2012	3:01:47 PM	Bubbler valve closed
5/25/2012	3:01:47 PM	Bypass valve opened
5/25/2012	3:01:47 PM	Helium MFC set to  0.000000
5/25/2012	3:01:47 PM	H2 MFC set to  0.000000
5/25/2012	3:01:47 PM	BCl3 MFC set to  0.000000
5/25/2012	3:01:47 PM	PH3 MFC set to  0.000000
5/25/2012	3:01:47 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:01:47 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:01:47 PM	Tube furnace set to 0
5/25/2012	3:02:06 PM	Helium valve closed
5/25/2012	3:02:06 PM	H2 valve closed
5/25/2012	3:02:06 PM	BCl3 valve closed
5/25/2012	3:02:06 PM	PH3 valve closed
5/25/2012	3:02:06 PM	SiCl4 pre valve closed
5/25/2012	3:02:06 PM	SiCl4 post valve closed
5/25/2012	3:02:06 PM	Bypass valve closed
5/25/2012	3:02:06 PM	Bubbler valve closed
5/25/2012	3:02:06 PM	Main Vac valve opened
5/25/2012	3:02:06 PM	Helium MFC set to  0.000000
5/25/2012	3:02:06 PM	H2 MFC set to  0.000000
5/25/2012	3:02:06 PM	BCl3 MFC set to  0.000000
5/25/2012	3:02:06 PM	PH3 MFC set to  0.000000
5/25/2012	3:02:06 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:02:06 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:02:06 PM	Tube furnace set to 0
5/25/2012	3:02:36 PM	H2 valve closed
5/25/2012	3:02:36 PM	BCl3 valve closed
5/25/2012	3:02:36 PM	PH3 valve closed
5/25/2012	3:02:36 PM	SiCl4 pre valve closed
5/25/2012	3:02:36 PM	SiCl4 post valve closed
5/25/2012	3:02:36 PM	Bypass valve closed
5/25/2012	3:02:37 PM	Bubbler valve closed
5/25/2012	3:02:37 PM	Helium valve opened
5/25/2012	3:02:37 PM	Main Vac valve opened
5/25/2012	3:02:37 PM	Helium MFC set to  20.000000
5/25/2012	3:02:37 PM	H2 MFC set to  0.000000
5/25/2012	3:02:37 PM	BCl3 MFC set to  0.000000
5/25/2012	3:02:37 PM	PH3 MFC set to  0.000000
5/25/2012	3:02:37 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:02:37 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:02:37 PM	Tube furnace set to 0
5/25/2012	3:03:07 PM	Helium valve closed
5/25/2012	3:03:07 PM	H2 valve closed
5/25/2012	3:03:07 PM	BCl3 valve closed
5/25/2012	3:03:07 PM	PH3 valve closed
5/25/2012	3:03:07 PM	SiCl4 pre valve closed
5/25/2012	3:03:07 PM	SiCl4 post valve closed
5/25/2012	3:03:07 PM	Bypass valve closed
5/25/2012	3:03:07 PM	Bubbler valve closed
5/25/2012	3:03:07 PM	Main Vac valve opened
5/25/2012	3:03:07 PM	Helium MFC set to  0.000000
5/25/2012	3:03:07 PM	H2 MFC set to  0.000000
5/25/2012	3:03:07 PM	BCl3 MFC set to  0.000000
5/25/2012	3:03:07 PM	PH3 MFC set to  0.000000
5/25/2012	3:03:07 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:03:07 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:03:07 PM	Tube furnace set to 0
5/25/2012	3:03:37 PM	H2 valve closed
5/25/2012	3:03:37 PM	BCl3 valve closed
5/25/2012	3:03:37 PM	PH3 valve closed
5/25/2012	3:03:37 PM	SiCl4 pre valve closed
5/25/2012	3:03:37 PM	SiCl4 post valve closed
5/25/2012	3:03:37 PM	Bypass valve closed
5/25/2012	3:03:37 PM	Bubbler valve closed
5/25/2012	3:03:37 PM	Helium valve opened
5/25/2012	3:03:37 PM	Main Vac valve opened
5/25/2012	3:03:37 PM	Helium MFC set to  20.000000
5/25/2012	3:03:37 PM	H2 MFC set to  0.000000
5/25/2012	3:03:37 PM	BCl3 MFC set to  0.000000
5/25/2012	3:03:37 PM	PH3 MFC set to  0.000000
5/25/2012	3:03:37 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:03:37 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:03:37 PM	Tube furnace set to 0
5/25/2012	3:04:07 PM	Helium valve closed
5/25/2012	3:04:07 PM	H2 valve closed
5/25/2012	3:04:07 PM	BCl3 valve closed
5/25/2012	3:04:07 PM	PH3 valve closed
5/25/2012	3:04:07 PM	SiCl4 pre valve closed
5/25/2012	3:04:07 PM	SiCl4 post valve closed
5/25/2012	3:04:07 PM	Bypass valve closed
5/25/2012	3:04:07 PM	Bubbler valve closed
5/25/2012	3:04:07 PM	Main Vac valve opened
5/25/2012	3:04:07 PM	Helium MFC set to  0.000000
5/25/2012	3:04:07 PM	H2 MFC set to  0.000000
5/25/2012	3:04:07 PM	BCl3 MFC set to  0.000000
5/25/2012	3:04:07 PM	PH3 MFC set to  0.000000
5/25/2012	3:04:07 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:04:07 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:04:07 PM	Tube furnace set to 0
5/25/2012	3:04:37 PM	H2 valve closed
5/25/2012	3:04:37 PM	BCl3 valve closed
5/25/2012	3:04:37 PM	PH3 valve closed
5/25/2012	3:04:37 PM	SiCl4 pre valve closed
5/25/2012	3:04:37 PM	SiCl4 post valve closed
5/25/2012	3:04:37 PM	Bypass valve closed
5/25/2012	3:04:37 PM	Bubbler valve closed
5/25/2012	3:04:37 PM	Helium valve opened
5/25/2012	3:04:37 PM	Main Vac valve opened
5/25/2012	3:04:37 PM	Helium MFC set to  20.000000
5/25/2012	3:04:37 PM	H2 MFC set to  0.000000
5/25/2012	3:04:37 PM	BCl3 MFC set to  0.000000
5/25/2012	3:04:37 PM	PH3 MFC set to  0.000000
5/25/2012	3:04:37 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:04:37 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:04:38 PM	Tube furnace set to 0
5/25/2012	3:05:08 PM	Helium valve closed
5/25/2012	3:05:08 PM	H2 valve closed
5/25/2012	3:05:08 PM	BCl3 valve closed
5/25/2012	3:05:08 PM	PH3 valve closed
5/25/2012	3:05:08 PM	SiCl4 pre valve closed
5/25/2012	3:05:08 PM	SiCl4 post valve closed
5/25/2012	3:05:08 PM	Bypass valve closed
5/25/2012	3:05:08 PM	Bubbler valve closed
5/25/2012	3:05:08 PM	Main Vac valve opened
5/25/2012	3:05:08 PM	Helium MFC set to  0.000000
5/25/2012	3:05:08 PM	H2 MFC set to  0.000000
5/25/2012	3:05:08 PM	BCl3 MFC set to  0.000000
5/25/2012	3:05:08 PM	PH3 MFC set to  0.000000
5/25/2012	3:05:08 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:05:08 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:05:08 PM	Tube furnace set to 0
5/25/2012	3:05:38 PM	H2 valve closed
5/25/2012	3:05:38 PM	BCl3 valve closed
5/25/2012	3:05:38 PM	PH3 valve closed
5/25/2012	3:05:38 PM	SiCl4 pre valve closed
5/25/2012	3:05:38 PM	SiCl4 post valve closed
5/25/2012	3:05:38 PM	Bypass valve closed
5/25/2012	3:05:38 PM	Bubbler valve closed
5/25/2012	3:05:38 PM	Helium valve opened
5/25/2012	3:05:38 PM	Main Vac valve opened
5/25/2012	3:05:38 PM	Helium MFC set to  20.000000
5/25/2012	3:05:38 PM	H2 MFC set to  0.000000
5/25/2012	3:05:38 PM	BCl3 MFC set to  0.000000
5/25/2012	3:05:38 PM	PH3 MFC set to  0.000000
5/25/2012	3:05:38 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:05:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:05:38 PM	Tube furnace set to 0
5/25/2012	3:06:08 PM	Helium valve closed
5/25/2012	3:06:08 PM	H2 valve closed
5/25/2012	3:06:08 PM	BCl3 valve closed
5/25/2012	3:06:08 PM	PH3 valve closed
5/25/2012	3:06:08 PM	SiCl4 pre valve closed
5/25/2012	3:06:08 PM	SiCl4 post valve closed
5/25/2012	3:06:08 PM	Bypass valve closed
5/25/2012	3:06:08 PM	Bubbler valve closed
5/25/2012	3:06:08 PM	Main Vac valve opened
5/25/2012	3:06:08 PM	Helium MFC set to  0.000000
5/25/2012	3:06:08 PM	H2 MFC set to  0.000000
5/25/2012	3:06:08 PM	BCl3 MFC set to  0.000000
5/25/2012	3:06:08 PM	PH3 MFC set to  0.000000
5/25/2012	3:06:08 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:06:08 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:06:08 PM	Tube furnace set to 0
5/25/2012	3:06:38 PM	H2 valve closed
5/25/2012	3:06:38 PM	BCl3 valve closed
5/25/2012	3:06:38 PM	PH3 valve closed
5/25/2012	3:06:38 PM	SiCl4 pre valve closed
5/25/2012	3:06:38 PM	SiCl4 post valve closed
5/25/2012	3:06:38 PM	Bypass valve closed
5/25/2012	3:06:38 PM	Bubbler valve closed
5/25/2012	3:06:38 PM	Helium valve opened
5/25/2012	3:06:38 PM	Main Vac valve opened
5/25/2012	3:06:38 PM	Helium MFC set to  20.000000
5/25/2012	3:06:38 PM	H2 MFC set to  0.000000
5/25/2012	3:06:38 PM	BCl3 MFC set to  0.000000
5/25/2012	3:06:38 PM	PH3 MFC set to  0.000000
5/25/2012	3:06:38 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:06:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:06:39 PM	Tube furnace set to 0
5/25/2012	3:07:09 PM	Helium valve closed
5/25/2012	3:07:09 PM	H2 valve closed
5/25/2012	3:07:09 PM	BCl3 valve closed
5/25/2012	3:07:09 PM	PH3 valve closed
5/25/2012	3:07:09 PM	SiCl4 pre valve closed
5/25/2012	3:07:09 PM	SiCl4 post valve closed
5/25/2012	3:07:09 PM	Bypass valve closed
5/25/2012	3:07:09 PM	Bubbler valve closed
5/25/2012	3:07:09 PM	Main Vac valve opened
5/25/2012	3:07:09 PM	Helium MFC set to  0.000000
5/25/2012	3:07:09 PM	H2 MFC set to  0.000000
5/25/2012	3:07:09 PM	BCl3 MFC set to  0.000000
5/25/2012	3:07:09 PM	PH3 MFC set to  0.000000
5/25/2012	3:07:09 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:07:09 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:07:09 PM	Tube furnace set to 0
5/25/2012	3:07:39 PM	H2 valve closed
5/25/2012	3:07:39 PM	BCl3 valve closed
5/25/2012	3:07:39 PM	PH3 valve closed
5/25/2012	3:07:39 PM	SiCl4 pre valve closed
5/25/2012	3:07:39 PM	SiCl4 post valve closed
5/25/2012	3:07:39 PM	Bypass valve closed
5/25/2012	3:07:39 PM	Bubbler valve closed
5/25/2012	3:07:39 PM	Helium valve opened
5/25/2012	3:07:39 PM	Main Vac valve opened
5/25/2012	3:07:39 PM	Helium MFC set to  20.000000
5/25/2012	3:07:39 PM	H2 MFC set to  0.000000
5/25/2012	3:07:39 PM	BCl3 MFC set to  0.000000
5/25/2012	3:07:39 PM	PH3 MFC set to  0.000000
5/25/2012	3:07:39 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:07:39 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:07:39 PM	Tube furnace set to 0
5/25/2012	3:08:09 PM	Helium valve closed
5/25/2012	3:08:09 PM	H2 valve closed
5/25/2012	3:08:09 PM	BCl3 valve closed
5/25/2012	3:08:09 PM	PH3 valve closed
5/25/2012	3:08:09 PM	SiCl4 pre valve closed
5/25/2012	3:08:09 PM	SiCl4 post valve closed
5/25/2012	3:08:09 PM	Bypass valve closed
5/25/2012	3:08:09 PM	Bubbler valve closed
5/25/2012	3:08:09 PM	Main Vac valve opened
5/25/2012	3:08:09 PM	Helium MFC set to  0.000000
5/25/2012	3:08:09 PM	H2 MFC set to  0.000000
5/25/2012	3:08:09 PM	BCl3 MFC set to  0.000000
5/25/2012	3:08:09 PM	PH3 MFC set to  0.000000
5/25/2012	3:08:09 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:08:09 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:08:09 PM	Tube furnace set to 0
5/25/2012	3:08:39 PM	H2 valve closed
5/25/2012	3:08:39 PM	BCl3 valve closed
5/25/2012	3:08:39 PM	PH3 valve closed
5/25/2012	3:08:39 PM	SiCl4 pre valve closed
5/25/2012	3:08:39 PM	SiCl4 post valve closed
5/25/2012	3:08:39 PM	Bypass valve closed
5/25/2012	3:08:39 PM	Bubbler valve closed
5/25/2012	3:08:39 PM	Helium valve opened
5/25/2012	3:08:39 PM	Main Vac valve opened
5/25/2012	3:08:39 PM	Helium MFC set to  20.000000
5/25/2012	3:08:39 PM	H2 MFC set to  0.000000
5/25/2012	3:08:39 PM	BCl3 MFC set to  0.000000
5/25/2012	3:08:39 PM	PH3 MFC set to  0.000000
5/25/2012	3:08:39 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:08:39 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:08:40 PM	Tube furnace set to 0
5/25/2012	3:09:10 PM	Helium valve closed
5/25/2012	3:09:10 PM	H2 valve closed
5/25/2012	3:09:10 PM	BCl3 valve closed
5/25/2012	3:09:10 PM	PH3 valve closed
5/25/2012	3:09:10 PM	SiCl4 pre valve closed
5/25/2012	3:09:10 PM	SiCl4 post valve closed
5/25/2012	3:09:10 PM	Bypass valve closed
5/25/2012	3:09:10 PM	Bubbler valve closed
5/25/2012	3:09:10 PM	Main Vac valve opened
5/25/2012	3:09:10 PM	Helium MFC set to  0.000000
5/25/2012	3:09:10 PM	H2 MFC set to  0.000000
5/25/2012	3:09:10 PM	BCl3 MFC set to  0.000000
5/25/2012	3:09:10 PM	PH3 MFC set to  0.000000
5/25/2012	3:09:10 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:09:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:09:10 PM	Tube furnace set to 0
5/25/2012	3:09:40 PM	H2 valve closed
5/25/2012	3:09:40 PM	BCl3 valve closed
5/25/2012	3:09:40 PM	PH3 valve closed
5/25/2012	3:09:40 PM	SiCl4 pre valve closed
5/25/2012	3:09:40 PM	SiCl4 post valve closed
5/25/2012	3:09:40 PM	Bypass valve closed
5/25/2012	3:09:40 PM	Bubbler valve closed
5/25/2012	3:09:40 PM	Helium valve opened
5/25/2012	3:09:40 PM	Main Vac valve opened
5/25/2012	3:09:40 PM	Helium MFC set to  20.000000
5/25/2012	3:09:40 PM	H2 MFC set to  0.000000
5/25/2012	3:09:40 PM	BCl3 MFC set to  0.000000
5/25/2012	3:09:40 PM	PH3 MFC set to  0.000000
5/25/2012	3:09:40 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:09:40 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:09:40 PM	Tube furnace set to 0
5/25/2012	3:10:10 PM	Helium valve closed
5/25/2012	3:10:10 PM	H2 valve closed
5/25/2012	3:10:10 PM	BCl3 valve closed
5/25/2012	3:10:10 PM	PH3 valve closed
5/25/2012	3:10:10 PM	SiCl4 pre valve closed
5/25/2012	3:10:10 PM	SiCl4 post valve closed
5/25/2012	3:10:10 PM	Bypass valve closed
5/25/2012	3:10:10 PM	Bubbler valve closed
5/25/2012	3:10:10 PM	Main Vac valve opened
5/25/2012	3:10:10 PM	Helium MFC set to  0.000000
5/25/2012	3:10:10 PM	H2 MFC set to  0.000000
5/25/2012	3:10:10 PM	BCl3 MFC set to  0.000000
5/25/2012	3:10:10 PM	PH3 MFC set to  0.000000
5/25/2012	3:10:10 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:10:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:10:10 PM	Tube furnace set to 0
5/25/2012	3:10:40 PM	H2 valve closed
5/25/2012	3:10:40 PM	BCl3 valve closed
5/25/2012	3:10:40 PM	PH3 valve closed
5/25/2012	3:10:40 PM	SiCl4 pre valve closed
5/25/2012	3:10:40 PM	SiCl4 post valve closed
5/25/2012	3:10:40 PM	Bypass valve closed
5/25/2012	3:10:40 PM	Bubbler valve closed
5/25/2012	3:10:40 PM	Helium valve opened
5/25/2012	3:10:40 PM	Main Vac valve opened
5/25/2012	3:10:40 PM	Helium MFC set to  20.000000
5/25/2012	3:10:40 PM	H2 MFC set to  0.000000
5/25/2012	3:10:40 PM	BCl3 MFC set to  0.000000
5/25/2012	3:10:40 PM	PH3 MFC set to  0.000000
5/25/2012	3:10:40 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:10:40 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:10:40 PM	Tube furnace set to 0
5/25/2012	3:11:10 PM	Helium valve closed
5/25/2012	3:11:10 PM	H2 valve closed
5/25/2012	3:11:10 PM	BCl3 valve closed
5/25/2012	3:11:10 PM	PH3 valve closed
5/25/2012	3:11:11 PM	SiCl4 pre valve closed
5/25/2012	3:11:11 PM	SiCl4 post valve closed
5/25/2012	3:11:11 PM	Bypass valve closed
5/25/2012	3:11:11 PM	Bubbler valve closed
5/25/2012	3:11:11 PM	Main Vac valve opened
5/25/2012	3:11:11 PM	Helium MFC set to  0.000000
5/25/2012	3:11:11 PM	H2 MFC set to  0.000000
5/25/2012	3:11:11 PM	BCl3 MFC set to  0.000000
5/25/2012	3:11:11 PM	PH3 MFC set to  0.000000
5/25/2012	3:11:11 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:11:11 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:11:11 PM	Tube furnace set to 0
5/25/2012	3:11:41 PM	H2 valve closed
5/25/2012	3:11:41 PM	BCl3 valve closed
5/25/2012	3:11:41 PM	PH3 valve closed
5/25/2012	3:11:41 PM	SiCl4 pre valve closed
5/25/2012	3:11:41 PM	SiCl4 post valve closed
5/25/2012	3:11:41 PM	Bypass valve closed
5/25/2012	3:11:41 PM	Bubbler valve closed
5/25/2012	3:11:41 PM	Helium valve opened
5/25/2012	3:11:41 PM	Main Vac valve opened
5/25/2012	3:11:41 PM	Helium MFC set to  20.000000
5/25/2012	3:11:41 PM	H2 MFC set to  0.000000
5/25/2012	3:11:41 PM	BCl3 MFC set to  0.000000
5/25/2012	3:11:41 PM	PH3 MFC set to  0.000000
5/25/2012	3:11:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:11:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:11:41 PM	Tube furnace set to 0
5/25/2012	3:12:11 PM	Helium valve closed
5/25/2012	3:12:11 PM	H2 valve closed
5/25/2012	3:12:11 PM	BCl3 valve closed
5/25/2012	3:12:11 PM	PH3 valve closed
5/25/2012	3:12:11 PM	SiCl4 pre valve closed
5/25/2012	3:12:11 PM	SiCl4 post valve closed
5/25/2012	3:12:11 PM	Bypass valve closed
5/25/2012	3:12:11 PM	Bubbler valve closed
5/25/2012	3:12:11 PM	Main Vac valve opened
5/25/2012	3:12:11 PM	Helium MFC set to  0.000000
5/25/2012	3:12:11 PM	H2 MFC set to  0.000000
5/25/2012	3:12:11 PM	BCl3 MFC set to  0.000000
5/25/2012	3:12:11 PM	PH3 MFC set to  0.000000
5/25/2012	3:12:11 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:12:11 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:12:11 PM	Tube furnace set to 0
5/25/2012	3:12:12 PM	Run finished at 3:12 PM
5/25/2012	3:12:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/25/2012	3:50:53 PM	Main Vac valve closed
5/25/2012	3:51:04 PM	Main Vac valve opened
5/25/2012	3:51:37 PM	Main Vac valve closed
5/25/2012	3:51:47 PM	Main Vac valve opened
5/25/2012	3:53:49 PM	Main Vac valve closed
5/25/2012	3:54:02 PM	Main Vac valve opened
5/25/2012	3:54:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	3:54:34 PM	Recipe started at 3:54 PM
5/25/2012	3:54:34 PM	Helium valve closed
5/25/2012	3:54:34 PM	H2 valve closed
5/25/2012	3:54:34 PM	BCl3 valve closed
5/25/2012	3:54:34 PM	PH3 valve closed
5/25/2012	3:54:34 PM	SiCl4 pre valve closed
5/25/2012	3:54:34 PM	SiCl4 post valve closed
5/25/2012	3:54:34 PM	Main Vac valve closed
5/25/2012	3:54:34 PM	Bypass valve closed
5/25/2012	3:54:34 PM	Bubbler valve closed
5/25/2012	3:54:34 PM	Helium MFC set to  0.000000
5/25/2012	3:54:34 PM	H2 MFC set to  0.000000
5/25/2012	3:54:34 PM	BCl3 MFC set to  0.000000
5/25/2012	3:54:34 PM	PH3 MFC set to  0.000000
5/25/2012	3:54:34 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:54:34 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:54:35 PM	Tube furnace set to 0
5/25/2012	3:54:38 PM	H2 valve closed
5/25/2012	3:54:38 PM	BCl3 valve closed
5/25/2012	3:54:38 PM	PH3 valve closed
5/25/2012	3:54:38 PM	SiCl4 pre valve closed
5/25/2012	3:54:38 PM	SiCl4 post valve closed
5/25/2012	3:54:38 PM	Main Vac valve closed
5/25/2012	3:54:38 PM	Bypass valve closed
5/25/2012	3:54:38 PM	Bubbler valve closed
5/25/2012	3:54:38 PM	Helium valve opened
5/25/2012	3:54:38 PM	Helium MFC set to  500.000000
5/25/2012	3:54:38 PM	H2 MFC set to  0.000000
5/25/2012	3:54:38 PM	BCl3 MFC set to  0.000000
5/25/2012	3:54:38 PM	PH3 MFC set to  0.000000
5/25/2012	3:54:38 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:54:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:54:38 PM	Tube furnace set to 0
5/25/2012	3:55:47 PM	Helium valve closed
5/25/2012	3:55:47 PM	H2 valve closed
5/25/2012	3:55:47 PM	BCl3 valve closed
5/25/2012	3:55:47 PM	PH3 valve closed
5/25/2012	3:55:47 PM	SiCl4 pre valve closed
5/25/2012	3:55:47 PM	SiCl4 post valve closed
5/25/2012	3:55:47 PM	Main Vac valve closed
5/25/2012	3:55:47 PM	Bypass valve closed
5/25/2012	3:55:47 PM	Bubbler valve closed
5/25/2012	3:55:47 PM	Helium MFC set to  0.000000
5/25/2012	3:55:47 PM	H2 MFC set to  0.000000
5/25/2012	3:55:47 PM	BCl3 MFC set to  0.000000
5/25/2012	3:55:47 PM	PH3 MFC set to  0.000000
5/25/2012	3:55:47 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:55:47 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:55:47 PM	Tube furnace set to 0
5/25/2012	3:55:48 PM	Run finished at 3:55 PM
5/25/2012	3:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	3:59:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	3:59:36 PM	Recipe started at 3:59 PM
5/25/2012	3:59:36 PM	Helium valve closed
5/25/2012	3:59:36 PM	H2 valve closed
5/25/2012	3:59:36 PM	BCl3 valve closed
5/25/2012	3:59:36 PM	PH3 valve closed
5/25/2012	3:59:36 PM	SiCl4 pre valve closed
5/25/2012	3:59:36 PM	SiCl4 post valve closed
5/25/2012	3:59:36 PM	Main Vac valve closed
5/25/2012	3:59:36 PM	Bubbler valve closed
5/25/2012	3:59:36 PM	Bypass valve opened
5/25/2012	3:59:36 PM	Helium MFC set to  0.000000
5/25/2012	3:59:36 PM	H2 MFC set to  0.000000
5/25/2012	3:59:36 PM	BCl3 MFC set to  0.000000
5/25/2012	3:59:36 PM	PH3 MFC set to  0.000000
5/25/2012	3:59:36 PM	SiCl4 MFC set to  0.000000
5/25/2012	3:59:36 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	3:59:36 PM	Tube furnace set to 0
5/25/2012	4:00:40 PM	Helium valve closed
5/25/2012	4:00:40 PM	H2 valve closed
5/25/2012	4:00:40 PM	BCl3 valve closed
5/25/2012	4:00:40 PM	PH3 valve closed
5/25/2012	4:00:40 PM	SiCl4 pre valve closed
5/25/2012	4:00:40 PM	SiCl4 post valve closed
5/25/2012	4:00:40 PM	Main Vac valve closed
5/25/2012	4:00:40 PM	Bubbler valve closed
5/25/2012	4:00:40 PM	Bypass valve opened
5/25/2012	4:00:40 PM	Helium MFC set to  0.000000
5/25/2012	4:00:41 PM	H2 MFC set to  0.000000
5/25/2012	4:00:41 PM	BCl3 MFC set to  0.000000
5/25/2012	4:00:41 PM	PH3 MFC set to  0.000000
5/25/2012	4:00:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:00:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:00:41 PM	Tube furnace set to 0
5/25/2012	4:01:41 PM	Helium valve closed
5/25/2012	4:01:41 PM	H2 valve closed
5/25/2012	4:01:41 PM	BCl3 valve closed
5/25/2012	4:01:41 PM	PH3 valve closed
5/25/2012	4:01:41 PM	SiCl4 pre valve closed
5/25/2012	4:01:41 PM	SiCl4 post valve closed
5/25/2012	4:01:41 PM	Bypass valve closed
5/25/2012	4:01:41 PM	Bubbler valve closed
5/25/2012	4:01:41 PM	Main Vac valve opened
5/25/2012	4:01:41 PM	Helium MFC set to  0.000000
5/25/2012	4:01:41 PM	H2 MFC set to  0.000000
5/25/2012	4:01:41 PM	BCl3 MFC set to  0.000000
5/25/2012	4:01:41 PM	PH3 MFC set to  0.000000
5/25/2012	4:01:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:01:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:01:41 PM	Tube furnace set to 0
5/25/2012	4:01:42 PM	Run finished at 4:01 PM
5/25/2012	4:01:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	4:02:06 PM	Recipe started at 4:02 PM
5/25/2012	4:02:06 PM	Helium valve closed
5/25/2012	4:02:06 PM	H2 valve closed
5/25/2012	4:02:06 PM	BCl3 valve closed
5/25/2012	4:02:06 PM	PH3 valve closed
5/25/2012	4:02:06 PM	SiCl4 pre valve closed
5/25/2012	4:02:06 PM	SiCl4 post valve closed
5/25/2012	4:02:06 PM	Main Vac valve closed
5/25/2012	4:02:06 PM	Bypass valve closed
5/25/2012	4:02:06 PM	Bubbler valve closed
5/25/2012	4:02:06 PM	Helium MFC set to  0.000000
5/25/2012	4:02:06 PM	H2 MFC set to  0.000000
5/25/2012	4:02:06 PM	BCl3 MFC set to  0.000000
5/25/2012	4:02:06 PM	PH3 MFC set to  0.000000
5/25/2012	4:02:06 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:02:06 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:02:06 PM	Tube furnace set to 0
5/25/2012	4:02:10 PM	Helium valve closed
5/25/2012	4:02:10 PM	H2 valve closed
5/25/2012	4:02:10 PM	BCl3 valve closed
5/25/2012	4:02:10 PM	PH3 valve closed
5/25/2012	4:02:10 PM	SiCl4 pre valve closed
5/25/2012	4:02:10 PM	SiCl4 post valve closed
5/25/2012	4:02:10 PM	Main Vac valve closed
5/25/2012	4:02:10 PM	Bubbler valve closed
5/25/2012	4:02:10 PM	Bypass valve opened
5/25/2012	4:02:10 PM	Helium MFC set to  0.000000
5/25/2012	4:02:10 PM	H2 MFC set to  0.000000
5/25/2012	4:02:10 PM	BCl3 MFC set to  0.000000
5/25/2012	4:02:10 PM	PH3 MFC set to  0.000000
5/25/2012	4:02:10 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:02:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:02:10 PM	Tube furnace set to 0
5/25/2012	4:02:10 PM	Helium valve closed
5/25/2012	4:02:10 PM	H2 valve closed
5/25/2012	4:02:10 PM	BCl3 valve closed
5/25/2012	4:02:10 PM	PH3 valve closed
5/25/2012	4:02:10 PM	SiCl4 pre valve closed
5/25/2012	4:02:10 PM	SiCl4 post valve closed
5/25/2012	4:02:10 PM	Main Vac valve closed
5/25/2012	4:02:10 PM	Bubbler valve closed
5/25/2012	4:02:10 PM	Bypass valve opened
5/25/2012	4:02:10 PM	Helium MFC set to  0.000000
5/25/2012	4:02:10 PM	H2 MFC set to  0.000000
5/25/2012	4:02:10 PM	BCl3 MFC set to  0.000000
5/25/2012	4:02:10 PM	PH3 MFC set to  0.000000
5/25/2012	4:02:10 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:02:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:02:10 PM	Tube furnace set to 0
5/25/2012	4:02:11 PM	Helium valve closed
5/25/2012	4:02:11 PM	H2 valve closed
5/25/2012	4:02:11 PM	BCl3 valve closed
5/25/2012	4:02:11 PM	PH3 valve closed
5/25/2012	4:02:11 PM	SiCl4 pre valve closed
5/25/2012	4:02:11 PM	SiCl4 post valve closed
5/25/2012	4:02:11 PM	Bypass valve closed
5/25/2012	4:02:11 PM	Bubbler valve closed
5/25/2012	4:02:11 PM	Main Vac valve opened
5/25/2012	4:02:11 PM	Helium MFC set to  0.000000
5/25/2012	4:02:11 PM	H2 MFC set to  0.000000
5/25/2012	4:02:11 PM	BCl3 MFC set to  0.000000
5/25/2012	4:02:11 PM	PH3 MFC set to  0.000000
5/25/2012	4:02:11 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:02:11 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:02:11 PM	Tube furnace set to 150
5/25/2012	4:46:31 PM	Helium valve closed
5/25/2012	4:46:31 PM	H2 valve closed
5/25/2012	4:46:31 PM	BCl3 valve closed
5/25/2012	4:46:31 PM	PH3 valve closed
5/25/2012	4:46:31 PM	SiCl4 pre valve closed
5/25/2012	4:46:31 PM	SiCl4 post valve closed
5/25/2012	4:46:31 PM	Bypass valve closed
5/25/2012	4:46:31 PM	Bubbler valve closed
5/25/2012	4:46:31 PM	Main Vac valve opened
5/25/2012	4:46:31 PM	Helium MFC set to  0.000000
5/25/2012	4:46:31 PM	H2 MFC set to  0.000000
5/25/2012	4:46:31 PM	BCl3 MFC set to  0.000000
5/25/2012	4:46:31 PM	PH3 MFC set to  0.000000
5/25/2012	4:46:31 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:46:31 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:46:31 PM	Tube furnace set to 0
5/25/2012	4:46:32 PM	Run finished at 4:46 PM
5/25/2012	4:46:49 PM	Main Vac valve closed
5/25/2012	4:46:56 PM	Main Vac valve opened
5/25/2012	4:47:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/25/2012	4:47:35 PM	Recipe started at 4:47 PM
5/25/2012	4:47:35 PM	Helium valve closed
5/25/2012	4:47:35 PM	H2 valve closed
5/25/2012	4:47:35 PM	BCl3 valve closed
5/25/2012	4:47:35 PM	PH3 valve closed
5/25/2012	4:47:35 PM	SiCl4 pre valve closed
5/25/2012	4:47:35 PM	SiCl4 post valve closed
5/25/2012	4:47:35 PM	Main Vac valve closed
5/25/2012	4:47:35 PM	Bubbler valve closed
5/25/2012	4:47:35 PM	Bypass valve opened
5/25/2012	4:47:35 PM	Helium MFC set to  0.000000
5/25/2012	4:47:35 PM	H2 MFC set to  0.000000
5/25/2012	4:47:35 PM	BCl3 MFC set to  0.000000
5/25/2012	4:47:35 PM	PH3 MFC set to  0.000000
5/25/2012	4:47:35 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:47:35 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:47:35 PM	Tube furnace set to 0
5/25/2012	4:47:35 PM	Helium valve closed
5/25/2012	4:47:35 PM	H2 valve closed
5/25/2012	4:47:35 PM	BCl3 valve closed
5/25/2012	4:47:35 PM	PH3 valve closed
5/25/2012	4:47:35 PM	SiCl4 pre valve closed
5/25/2012	4:47:35 PM	SiCl4 post valve closed
5/25/2012	4:47:35 PM	Main Vac valve closed
5/25/2012	4:47:35 PM	Bubbler valve closed
5/25/2012	4:47:35 PM	Bypass valve opened
5/25/2012	4:47:35 PM	Helium MFC set to  0.000000
5/25/2012	4:47:35 PM	H2 MFC set to  0.000000
5/25/2012	4:47:35 PM	BCl3 MFC set to  0.000000
5/25/2012	4:47:35 PM	PH3 MFC set to  0.000000
5/25/2012	4:47:35 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:47:35 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:47:36 PM	Tube furnace set to 0
5/25/2012	4:47:48 PM	Helium valve closed
5/25/2012	4:47:48 PM	H2 valve closed
5/25/2012	4:47:48 PM	BCl3 valve closed
5/25/2012	4:47:48 PM	PH3 valve closed
5/25/2012	4:47:48 PM	SiCl4 pre valve closed
5/25/2012	4:47:48 PM	SiCl4 post valve closed
5/25/2012	4:47:48 PM	Bypass valve closed
5/25/2012	4:47:48 PM	Bubbler valve closed
5/25/2012	4:47:48 PM	Main Vac valve opened
5/25/2012	4:47:48 PM	Helium MFC set to  0.000000
5/25/2012	4:47:48 PM	H2 MFC set to  0.000000
5/25/2012	4:47:48 PM	BCl3 MFC set to  0.000000
5/25/2012	4:47:48 PM	PH3 MFC set to  0.000000
5/25/2012	4:47:48 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:47:48 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:47:49 PM	Tube furnace set to 0
5/25/2012	4:48:19 PM	H2 valve closed
5/25/2012	4:48:19 PM	BCl3 valve closed
5/25/2012	4:48:19 PM	PH3 valve closed
5/25/2012	4:48:19 PM	SiCl4 pre valve closed
5/25/2012	4:48:19 PM	SiCl4 post valve closed
5/25/2012	4:48:19 PM	Bypass valve closed
5/25/2012	4:48:19 PM	Bubbler valve closed
5/25/2012	4:48:19 PM	Helium valve opened
5/25/2012	4:48:19 PM	Main Vac valve opened
5/25/2012	4:48:19 PM	Helium MFC set to  20.000000
5/25/2012	4:48:19 PM	H2 MFC set to  0.000000
5/25/2012	4:48:19 PM	BCl3 MFC set to  0.000000
5/25/2012	4:48:19 PM	PH3 MFC set to  0.000000
5/25/2012	4:48:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:48:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:48:19 PM	Tube furnace set to 0
5/25/2012	4:48:49 PM	Helium valve closed
5/25/2012	4:48:49 PM	H2 valve closed
5/25/2012	4:48:49 PM	BCl3 valve closed
5/25/2012	4:48:49 PM	PH3 valve closed
5/25/2012	4:48:49 PM	SiCl4 pre valve closed
5/25/2012	4:48:49 PM	SiCl4 post valve closed
5/25/2012	4:48:49 PM	Bypass valve closed
5/25/2012	4:48:49 PM	Bubbler valve closed
5/25/2012	4:48:49 PM	Main Vac valve opened
5/25/2012	4:48:49 PM	Helium MFC set to  0.000000
5/25/2012	4:48:49 PM	H2 MFC set to  0.000000
5/25/2012	4:48:49 PM	BCl3 MFC set to  0.000000
5/25/2012	4:48:49 PM	PH3 MFC set to  0.000000
5/25/2012	4:48:49 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:48:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:48:49 PM	Tube furnace set to 0
5/25/2012	4:49:19 PM	H2 valve closed
5/25/2012	4:49:19 PM	BCl3 valve closed
5/25/2012	4:49:19 PM	PH3 valve closed
5/25/2012	4:49:19 PM	SiCl4 pre valve closed
5/25/2012	4:49:19 PM	SiCl4 post valve closed
5/25/2012	4:49:19 PM	Bypass valve closed
5/25/2012	4:49:19 PM	Bubbler valve closed
5/25/2012	4:49:19 PM	Helium valve opened
5/25/2012	4:49:19 PM	Main Vac valve opened
5/25/2012	4:49:19 PM	Helium MFC set to  20.000000
5/25/2012	4:49:19 PM	H2 MFC set to  0.000000
5/25/2012	4:49:19 PM	BCl3 MFC set to  0.000000
5/25/2012	4:49:19 PM	PH3 MFC set to  0.000000
5/25/2012	4:49:19 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:49:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:49:19 PM	Tube furnace set to 0
5/25/2012	4:49:49 PM	Helium valve closed
5/25/2012	4:49:49 PM	H2 valve closed
5/25/2012	4:49:49 PM	BCl3 valve closed
5/25/2012	4:49:49 PM	PH3 valve closed
5/25/2012	4:49:49 PM	SiCl4 pre valve closed
5/25/2012	4:49:49 PM	SiCl4 post valve closed
5/25/2012	4:49:49 PM	Bypass valve closed
5/25/2012	4:49:49 PM	Bubbler valve closed
5/25/2012	4:49:49 PM	Main Vac valve opened
5/25/2012	4:49:49 PM	Helium MFC set to  0.000000
5/25/2012	4:49:49 PM	H2 MFC set to  0.000000
5/25/2012	4:49:49 PM	BCl3 MFC set to  0.000000
5/25/2012	4:49:49 PM	PH3 MFC set to  0.000000
5/25/2012	4:49:49 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:49:49 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:49:50 PM	Tube furnace set to 0
5/25/2012	4:50:20 PM	H2 valve closed
5/25/2012	4:50:20 PM	BCl3 valve closed
5/25/2012	4:50:20 PM	PH3 valve closed
5/25/2012	4:50:20 PM	SiCl4 pre valve closed
5/25/2012	4:50:20 PM	SiCl4 post valve closed
5/25/2012	4:50:20 PM	Bypass valve closed
5/25/2012	4:50:20 PM	Bubbler valve closed
5/25/2012	4:50:20 PM	Helium valve opened
5/25/2012	4:50:20 PM	Main Vac valve opened
5/25/2012	4:50:20 PM	Helium MFC set to  20.000000
5/25/2012	4:50:20 PM	H2 MFC set to  0.000000
5/25/2012	4:50:20 PM	BCl3 MFC set to  0.000000
5/25/2012	4:50:20 PM	PH3 MFC set to  0.000000
5/25/2012	4:50:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:50:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:50:20 PM	Tube furnace set to 0
5/25/2012	4:50:50 PM	Helium valve closed
5/25/2012	4:50:50 PM	H2 valve closed
5/25/2012	4:50:50 PM	BCl3 valve closed
5/25/2012	4:50:50 PM	PH3 valve closed
5/25/2012	4:50:50 PM	SiCl4 pre valve closed
5/25/2012	4:50:50 PM	SiCl4 post valve closed
5/25/2012	4:50:50 PM	Bypass valve closed
5/25/2012	4:50:50 PM	Bubbler valve closed
5/25/2012	4:50:50 PM	Main Vac valve opened
5/25/2012	4:50:50 PM	Helium MFC set to  0.000000
5/25/2012	4:50:50 PM	H2 MFC set to  0.000000
5/25/2012	4:50:50 PM	BCl3 MFC set to  0.000000
5/25/2012	4:50:50 PM	PH3 MFC set to  0.000000
5/25/2012	4:50:50 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:50:50 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:50:50 PM	Tube furnace set to 0
5/25/2012	4:51:20 PM	H2 valve closed
5/25/2012	4:51:20 PM	BCl3 valve closed
5/25/2012	4:51:20 PM	PH3 valve closed
5/25/2012	4:51:20 PM	SiCl4 pre valve closed
5/25/2012	4:51:20 PM	SiCl4 post valve closed
5/25/2012	4:51:20 PM	Bypass valve closed
5/25/2012	4:51:20 PM	Bubbler valve closed
5/25/2012	4:51:20 PM	Helium valve opened
5/25/2012	4:51:20 PM	Main Vac valve opened
5/25/2012	4:51:20 PM	Helium MFC set to  20.000000
5/25/2012	4:51:20 PM	H2 MFC set to  0.000000
5/25/2012	4:51:20 PM	BCl3 MFC set to  0.000000
5/25/2012	4:51:20 PM	PH3 MFC set to  0.000000
5/25/2012	4:51:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:51:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:51:20 PM	Tube furnace set to 0
5/25/2012	4:51:50 PM	Helium valve closed
5/25/2012	4:51:50 PM	H2 valve closed
5/25/2012	4:51:50 PM	BCl3 valve closed
5/25/2012	4:51:50 PM	PH3 valve closed
5/25/2012	4:51:50 PM	SiCl4 pre valve closed
5/25/2012	4:51:50 PM	SiCl4 post valve closed
5/25/2012	4:51:50 PM	Bypass valve closed
5/25/2012	4:51:50 PM	Bubbler valve closed
5/25/2012	4:51:50 PM	Main Vac valve opened
5/25/2012	4:51:50 PM	Helium MFC set to  0.000000
5/25/2012	4:51:50 PM	H2 MFC set to  0.000000
5/25/2012	4:51:50 PM	BCl3 MFC set to  0.000000
5/25/2012	4:51:50 PM	PH3 MFC set to  0.000000
5/25/2012	4:51:50 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:51:50 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:51:51 PM	Tube furnace set to 0
5/25/2012	4:52:21 PM	H2 valve closed
5/25/2012	4:52:21 PM	BCl3 valve closed
5/25/2012	4:52:21 PM	PH3 valve closed
5/25/2012	4:52:21 PM	SiCl4 pre valve closed
5/25/2012	4:52:21 PM	SiCl4 post valve closed
5/25/2012	4:52:21 PM	Bypass valve closed
5/25/2012	4:52:21 PM	Bubbler valve closed
5/25/2012	4:52:21 PM	Helium valve opened
5/25/2012	4:52:21 PM	Main Vac valve opened
5/25/2012	4:52:21 PM	Helium MFC set to  20.000000
5/25/2012	4:52:21 PM	H2 MFC set to  0.000000
5/25/2012	4:52:21 PM	BCl3 MFC set to  0.000000
5/25/2012	4:52:21 PM	PH3 MFC set to  0.000000
5/25/2012	4:52:21 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:52:21 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:52:21 PM	Tube furnace set to 0
5/25/2012	4:52:51 PM	Helium valve closed
5/25/2012	4:52:51 PM	H2 valve closed
5/25/2012	4:52:51 PM	BCl3 valve closed
5/25/2012	4:52:51 PM	PH3 valve closed
5/25/2012	4:52:51 PM	SiCl4 pre valve closed
5/25/2012	4:52:51 PM	SiCl4 post valve closed
5/25/2012	4:52:51 PM	Bypass valve closed
5/25/2012	4:52:51 PM	Bubbler valve closed
5/25/2012	4:52:51 PM	Main Vac valve opened
5/25/2012	4:52:51 PM	Helium MFC set to  0.000000
5/25/2012	4:52:51 PM	H2 MFC set to  0.000000
5/25/2012	4:52:51 PM	BCl3 MFC set to  0.000000
5/25/2012	4:52:51 PM	PH3 MFC set to  0.000000
5/25/2012	4:52:51 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:52:51 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:52:51 PM	Tube furnace set to 0
5/25/2012	4:53:21 PM	H2 valve closed
5/25/2012	4:53:21 PM	BCl3 valve closed
5/25/2012	4:53:21 PM	PH3 valve closed
5/25/2012	4:53:21 PM	SiCl4 pre valve closed
5/25/2012	4:53:21 PM	SiCl4 post valve closed
5/25/2012	4:53:21 PM	Bypass valve closed
5/25/2012	4:53:21 PM	Bubbler valve closed
5/25/2012	4:53:21 PM	Helium valve opened
5/25/2012	4:53:21 PM	Main Vac valve opened
5/25/2012	4:53:21 PM	Helium MFC set to  20.000000
5/25/2012	4:53:21 PM	H2 MFC set to  0.000000
5/25/2012	4:53:21 PM	BCl3 MFC set to  0.000000
5/25/2012	4:53:21 PM	PH3 MFC set to  0.000000
5/25/2012	4:53:21 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:53:21 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:53:21 PM	Tube furnace set to 0
5/25/2012	4:53:51 PM	Helium valve closed
5/25/2012	4:53:51 PM	H2 valve closed
5/25/2012	4:53:51 PM	BCl3 valve closed
5/25/2012	4:53:51 PM	PH3 valve closed
5/25/2012	4:53:51 PM	SiCl4 pre valve closed
5/25/2012	4:53:51 PM	SiCl4 post valve closed
5/25/2012	4:53:51 PM	Bypass valve closed
5/25/2012	4:53:51 PM	Bubbler valve closed
5/25/2012	4:53:51 PM	Main Vac valve opened
5/25/2012	4:53:51 PM	Helium MFC set to  0.000000
5/25/2012	4:53:51 PM	H2 MFC set to  0.000000
5/25/2012	4:53:51 PM	BCl3 MFC set to  0.000000
5/25/2012	4:53:51 PM	PH3 MFC set to  0.000000
5/25/2012	4:53:51 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:53:51 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:53:52 PM	Tube furnace set to 0
5/25/2012	4:54:22 PM	H2 valve closed
5/25/2012	4:54:22 PM	BCl3 valve closed
5/25/2012	4:54:22 PM	PH3 valve closed
5/25/2012	4:54:22 PM	SiCl4 pre valve closed
5/25/2012	4:54:22 PM	SiCl4 post valve closed
5/25/2012	4:54:22 PM	Bypass valve closed
5/25/2012	4:54:22 PM	Bubbler valve closed
5/25/2012	4:54:22 PM	Helium valve opened
5/25/2012	4:54:22 PM	Main Vac valve opened
5/25/2012	4:54:22 PM	Helium MFC set to  20.000000
5/25/2012	4:54:22 PM	H2 MFC set to  0.000000
5/25/2012	4:54:22 PM	BCl3 MFC set to  0.000000
5/25/2012	4:54:22 PM	PH3 MFC set to  0.000000
5/25/2012	4:54:22 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:54:22 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:54:22 PM	Tube furnace set to 0
5/25/2012	4:54:52 PM	Helium valve closed
5/25/2012	4:54:52 PM	H2 valve closed
5/25/2012	4:54:52 PM	BCl3 valve closed
5/25/2012	4:54:52 PM	PH3 valve closed
5/25/2012	4:54:52 PM	SiCl4 pre valve closed
5/25/2012	4:54:52 PM	SiCl4 post valve closed
5/25/2012	4:54:52 PM	Bypass valve closed
5/25/2012	4:54:52 PM	Bubbler valve closed
5/25/2012	4:54:52 PM	Main Vac valve opened
5/25/2012	4:54:52 PM	Helium MFC set to  0.000000
5/25/2012	4:54:52 PM	H2 MFC set to  0.000000
5/25/2012	4:54:52 PM	BCl3 MFC set to  0.000000
5/25/2012	4:54:52 PM	PH3 MFC set to  0.000000
5/25/2012	4:54:52 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:54:52 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:54:52 PM	Tube furnace set to 0
5/25/2012	4:55:22 PM	H2 valve closed
5/25/2012	4:55:22 PM	BCl3 valve closed
5/25/2012	4:55:22 PM	PH3 valve closed
5/25/2012	4:55:22 PM	SiCl4 pre valve closed
5/25/2012	4:55:22 PM	SiCl4 post valve closed
5/25/2012	4:55:22 PM	Bypass valve closed
5/25/2012	4:55:22 PM	Bubbler valve closed
5/25/2012	4:55:22 PM	Helium valve opened
5/25/2012	4:55:22 PM	Main Vac valve opened
5/25/2012	4:55:22 PM	Helium MFC set to  20.000000
5/25/2012	4:55:22 PM	H2 MFC set to  0.000000
5/25/2012	4:55:22 PM	BCl3 MFC set to  0.000000
5/25/2012	4:55:22 PM	PH3 MFC set to  0.000000
5/25/2012	4:55:22 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:55:22 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:55:22 PM	Tube furnace set to 0
5/25/2012	4:55:52 PM	Helium valve closed
5/25/2012	4:55:52 PM	H2 valve closed
5/25/2012	4:55:52 PM	BCl3 valve closed
5/25/2012	4:55:52 PM	PH3 valve closed
5/25/2012	4:55:52 PM	SiCl4 pre valve closed
5/25/2012	4:55:52 PM	SiCl4 post valve closed
5/25/2012	4:55:52 PM	Bypass valve closed
5/25/2012	4:55:52 PM	Bubbler valve closed
5/25/2012	4:55:52 PM	Main Vac valve opened
5/25/2012	4:55:52 PM	Helium MFC set to  0.000000
5/25/2012	4:55:52 PM	H2 MFC set to  0.000000
5/25/2012	4:55:52 PM	BCl3 MFC set to  0.000000
5/25/2012	4:55:52 PM	PH3 MFC set to  0.000000
5/25/2012	4:55:52 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:55:52 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:55:53 PM	Tube furnace set to 0
5/25/2012	4:56:23 PM	H2 valve closed
5/25/2012	4:56:23 PM	BCl3 valve closed
5/25/2012	4:56:23 PM	PH3 valve closed
5/25/2012	4:56:23 PM	SiCl4 pre valve closed
5/25/2012	4:56:23 PM	SiCl4 post valve closed
5/25/2012	4:56:23 PM	Bypass valve closed
5/25/2012	4:56:23 PM	Bubbler valve closed
5/25/2012	4:56:23 PM	Helium valve opened
5/25/2012	4:56:23 PM	Main Vac valve opened
5/25/2012	4:56:23 PM	Helium MFC set to  20.000000
5/25/2012	4:56:23 PM	H2 MFC set to  0.000000
5/25/2012	4:56:23 PM	BCl3 MFC set to  0.000000
5/25/2012	4:56:23 PM	PH3 MFC set to  0.000000
5/25/2012	4:56:23 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:56:23 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:56:23 PM	Tube furnace set to 0
5/25/2012	4:56:53 PM	Helium valve closed
5/25/2012	4:56:53 PM	H2 valve closed
5/25/2012	4:56:53 PM	BCl3 valve closed
5/25/2012	4:56:53 PM	PH3 valve closed
5/25/2012	4:56:53 PM	SiCl4 pre valve closed
5/25/2012	4:56:53 PM	SiCl4 post valve closed
5/25/2012	4:56:53 PM	Bypass valve closed
5/25/2012	4:56:53 PM	Bubbler valve closed
5/25/2012	4:56:53 PM	Main Vac valve opened
5/25/2012	4:56:53 PM	Helium MFC set to  0.000000
5/25/2012	4:56:53 PM	H2 MFC set to  0.000000
5/25/2012	4:56:53 PM	BCl3 MFC set to  0.000000
5/25/2012	4:56:53 PM	PH3 MFC set to  0.000000
5/25/2012	4:56:53 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:56:53 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:56:53 PM	Tube furnace set to 0
5/25/2012	4:57:23 PM	H2 valve closed
5/25/2012	4:57:23 PM	BCl3 valve closed
5/25/2012	4:57:23 PM	PH3 valve closed
5/25/2012	4:57:23 PM	SiCl4 pre valve closed
5/25/2012	4:57:23 PM	SiCl4 post valve closed
5/25/2012	4:57:23 PM	Bypass valve closed
5/25/2012	4:57:23 PM	Bubbler valve closed
5/25/2012	4:57:23 PM	Helium valve opened
5/25/2012	4:57:23 PM	Main Vac valve opened
5/25/2012	4:57:23 PM	Helium MFC set to  20.000000
5/25/2012	4:57:23 PM	H2 MFC set to  0.000000
5/25/2012	4:57:23 PM	BCl3 MFC set to  0.000000
5/25/2012	4:57:23 PM	PH3 MFC set to  0.000000
5/25/2012	4:57:23 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:57:23 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:57:23 PM	Tube furnace set to 0
5/25/2012	4:57:53 PM	Helium valve closed
5/25/2012	4:57:53 PM	H2 valve closed
5/25/2012	4:57:53 PM	BCl3 valve closed
5/25/2012	4:57:53 PM	PH3 valve closed
5/25/2012	4:57:53 PM	SiCl4 pre valve closed
5/25/2012	4:57:53 PM	SiCl4 post valve closed
5/25/2012	4:57:53 PM	Bypass valve closed
5/25/2012	4:57:53 PM	Bubbler valve closed
5/25/2012	4:57:53 PM	Main Vac valve opened
5/25/2012	4:57:53 PM	Helium MFC set to  0.000000
5/25/2012	4:57:53 PM	H2 MFC set to  0.000000
5/25/2012	4:57:53 PM	BCl3 MFC set to  0.000000
5/25/2012	4:57:53 PM	PH3 MFC set to  0.000000
5/25/2012	4:57:53 PM	SiCl4 MFC set to  0.000000
5/25/2012	4:57:53 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	4:57:53 PM	Tube furnace set to 0
5/25/2012	4:57:54 PM	Run finished at 4:57 PM
5/25/2012	4:57:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/25/2012	5:10:54 PM	Main Vac valve closed
5/25/2012	5:11:06 PM	Main Vac valve opened
5/25/2012	5:12:24 PM	Recipe started at 5:12 PM
5/25/2012	5:12:24 PM	Helium valve closed
5/25/2012	5:12:24 PM	H2 valve closed
5/25/2012	5:12:24 PM	BCl3 valve closed
5/25/2012	5:12:24 PM	PH3 valve closed
5/25/2012	5:12:24 PM	SiCl4 pre valve closed
5/25/2012	5:12:24 PM	SiCl4 post valve closed
5/25/2012	5:12:24 PM	Main Vac valve closed
5/25/2012	5:12:24 PM	Bypass valve closed
5/25/2012	5:12:24 PM	Bubbler valve closed
5/25/2012	5:12:24 PM	Helium MFC set to  0.000000
5/25/2012	5:12:24 PM	H2 MFC set to  0.000000
5/25/2012	5:12:24 PM	BCl3 MFC set to  0.000000
5/25/2012	5:12:24 PM	PH3 MFC set to  0.000000
5/25/2012	5:12:24 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:12:24 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:12:24 PM	Tube furnace set to 0
5/25/2012	5:12:27 PM	Helium valve closed
5/25/2012	5:12:27 PM	BCl3 valve closed
5/25/2012	5:12:27 PM	PH3 valve closed
5/25/2012	5:12:27 PM	SiCl4 pre valve closed
5/25/2012	5:12:27 PM	SiCl4 post valve closed
5/25/2012	5:12:27 PM	Main Vac valve closed
5/25/2012	5:12:27 PM	Bypass valve closed
5/25/2012	5:12:27 PM	Bubbler valve closed
5/25/2012	5:12:27 PM	H2 valve opened
5/25/2012	5:12:27 PM	Helium MFC set to  0.000000
5/25/2012	5:12:27 PM	H2 MFC set to  500.000000
5/25/2012	5:12:27 PM	BCl3 MFC set to  0.000000
5/25/2012	5:12:27 PM	PH3 MFC set to  0.000000
5/25/2012	5:12:27 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:12:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:12:27 PM	Tube furnace set to 50
5/25/2012	5:13:40 PM	Helium valve closed
5/25/2012	5:13:40 PM	BCl3 valve closed
5/25/2012	5:13:40 PM	PH3 valve closed
5/25/2012	5:13:40 PM	SiCl4 pre valve closed
5/25/2012	5:13:40 PM	SiCl4 post valve closed
5/25/2012	5:13:40 PM	Main Vac valve closed
5/25/2012	5:13:40 PM	Bypass valve closed
5/25/2012	5:13:40 PM	H2 valve opened
5/25/2012	5:13:40 PM	Bubbler valve opened
5/25/2012	5:13:40 PM	Helium MFC set to  0.000000
5/25/2012	5:13:40 PM	H2 MFC set to  500.000000
5/25/2012	5:13:40 PM	BCl3 MFC set to  0.000000
5/25/2012	5:13:40 PM	PH3 MFC set to  0.000000
5/25/2012	5:13:40 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:13:40 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:13:40 PM	Tube furnace set to 50
5/25/2012	5:13:41 PM	Helium valve closed
5/25/2012	5:13:41 PM	BCl3 valve closed
5/25/2012	5:13:41 PM	PH3 valve closed
5/25/2012	5:13:41 PM	SiCl4 pre valve closed
5/25/2012	5:13:41 PM	SiCl4 post valve closed
5/25/2012	5:13:41 PM	Main Vac valve closed
5/25/2012	5:13:41 PM	Bypass valve closed
5/25/2012	5:13:41 PM	H2 valve opened
5/25/2012	5:13:41 PM	Bubbler valve opened
5/25/2012	5:13:41 PM	Helium MFC set to  0.000000
5/25/2012	5:13:41 PM	H2 MFC set to  500.000000
5/25/2012	5:13:41 PM	BCl3 MFC set to  0.000000
5/25/2012	5:13:41 PM	PH3 MFC set to  0.000000
5/25/2012	5:13:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:13:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:13:42 PM	Tube furnace set to 1000
5/25/2012	5:33:42 PM	Helium valve closed
5/25/2012	5:33:42 PM	BCl3 valve closed
5/25/2012	5:33:42 PM	Main Vac valve closed
5/25/2012	5:33:42 PM	Bypass valve closed
5/25/2012	5:33:42 PM	H2 valve opened
5/25/2012	5:33:42 PM	PH3 valve opened
5/25/2012	5:33:42 PM	SiCl4 pre valve opened
5/25/2012	5:33:42 PM	SiCl4 post valve opened
5/25/2012	5:33:42 PM	Bubbler valve opened
5/25/2012	5:33:42 PM	Helium MFC set to  0.000000
5/25/2012	5:33:42 PM	H2 MFC set to  500.000000
5/25/2012	5:33:42 PM	BCl3 MFC set to  0.000000
5/25/2012	5:33:42 PM	PH3 MFC set to  0.300000
5/25/2012	5:33:42 PM	SiCl4 MFC set to  50.000000
5/25/2012	5:33:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:33:42 PM	Tube furnace set to 1000
5/25/2012	5:53:42 PM	Helium valve closed
5/25/2012	5:53:42 PM	BCl3 valve closed
5/25/2012	5:53:42 PM	PH3 valve closed
5/25/2012	5:53:42 PM	SiCl4 pre valve closed
5/25/2012	5:53:42 PM	SiCl4 post valve closed
5/25/2012	5:53:42 PM	Main Vac valve closed
5/25/2012	5:53:42 PM	Bypass valve closed
5/25/2012	5:53:42 PM	H2 valve opened
5/25/2012	5:53:42 PM	Bubbler valve opened
5/25/2012	5:53:42 PM	Helium MFC set to  0.000000
5/25/2012	5:53:42 PM	H2 MFC set to  500.000000
5/25/2012	5:53:42 PM	BCl3 MFC set to  0.000000
5/25/2012	5:53:42 PM	PH3 MFC set to  0.000000
5/25/2012	5:53:42 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:53:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:53:42 PM	Tube furnace set to 950
5/25/2012	5:56:42 PM	H2 valve closed
5/25/2012	5:56:42 PM	BCl3 valve closed
5/25/2012	5:56:42 PM	PH3 valve closed
5/25/2012	5:56:42 PM	SiCl4 pre valve closed
5/25/2012	5:56:42 PM	SiCl4 post valve closed
5/25/2012	5:56:42 PM	Main Vac valve closed
5/25/2012	5:56:42 PM	Bypass valve closed
5/25/2012	5:56:42 PM	Helium valve opened
5/25/2012	5:56:42 PM	Bubbler valve opened
5/25/2012	5:56:42 PM	Helium MFC set to  500.000000
5/25/2012	5:56:42 PM	H2 MFC set to  0.000000
5/25/2012	5:56:42 PM	BCl3 MFC set to  0.000000
5/25/2012	5:56:42 PM	PH3 MFC set to  0.000000
5/25/2012	5:56:42 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:56:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:56:42 PM	Tube furnace set to 900
5/25/2012	5:59:42 PM	H2 valve closed
5/25/2012	5:59:42 PM	BCl3 valve closed
5/25/2012	5:59:42 PM	PH3 valve closed
5/25/2012	5:59:42 PM	SiCl4 pre valve closed
5/25/2012	5:59:42 PM	SiCl4 post valve closed
5/25/2012	5:59:42 PM	Main Vac valve closed
5/25/2012	5:59:42 PM	Bypass valve closed
5/25/2012	5:59:42 PM	Helium valve opened
5/25/2012	5:59:42 PM	Bubbler valve opened
5/25/2012	5:59:42 PM	Helium MFC set to  500.000000
5/25/2012	5:59:42 PM	H2 MFC set to  0.000000
5/25/2012	5:59:42 PM	BCl3 MFC set to  0.000000
5/25/2012	5:59:42 PM	PH3 MFC set to  0.000000
5/25/2012	5:59:42 PM	SiCl4 MFC set to  0.000000
5/25/2012	5:59:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	5:59:42 PM	Tube furnace set to 850
5/25/2012	6:02:42 PM	H2 valve closed
5/25/2012	6:02:42 PM	BCl3 valve closed
5/25/2012	6:02:42 PM	PH3 valve closed
5/25/2012	6:02:42 PM	SiCl4 pre valve closed
5/25/2012	6:02:42 PM	SiCl4 post valve closed
5/25/2012	6:02:42 PM	Main Vac valve closed
5/25/2012	6:02:42 PM	Bypass valve closed
5/25/2012	6:02:42 PM	Helium valve opened
5/25/2012	6:02:42 PM	Bubbler valve opened
5/25/2012	6:02:42 PM	Helium MFC set to  500.000000
5/25/2012	6:02:42 PM	H2 MFC set to  0.000000
5/25/2012	6:02:42 PM	BCl3 MFC set to  0.000000
5/25/2012	6:02:42 PM	PH3 MFC set to  0.000000
5/25/2012	6:02:42 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:02:42 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:02:43 PM	Tube furnace set to 800
5/25/2012	6:05:43 PM	H2 valve closed
5/25/2012	6:05:43 PM	BCl3 valve closed
5/25/2012	6:05:43 PM	PH3 valve closed
5/25/2012	6:05:43 PM	SiCl4 pre valve closed
5/25/2012	6:05:43 PM	SiCl4 post valve closed
5/25/2012	6:05:43 PM	Main Vac valve closed
5/25/2012	6:05:43 PM	Bypass valve closed
5/25/2012	6:05:43 PM	Helium valve opened
5/25/2012	6:05:43 PM	Bubbler valve opened
5/25/2012	6:05:43 PM	Helium MFC set to  500.000000
5/25/2012	6:05:43 PM	H2 MFC set to  0.000000
5/25/2012	6:05:43 PM	BCl3 MFC set to  0.000000
5/25/2012	6:05:43 PM	PH3 MFC set to  0.000000
5/25/2012	6:05:43 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:05:43 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:05:43 PM	Tube furnace set to 750
5/25/2012	6:08:43 PM	H2 valve closed
5/25/2012	6:08:43 PM	BCl3 valve closed
5/25/2012	6:08:43 PM	PH3 valve closed
5/25/2012	6:08:43 PM	SiCl4 pre valve closed
5/25/2012	6:08:43 PM	SiCl4 post valve closed
5/25/2012	6:08:43 PM	Main Vac valve closed
5/25/2012	6:08:43 PM	Bypass valve closed
5/25/2012	6:08:43 PM	Helium valve opened
5/25/2012	6:08:43 PM	Bubbler valve opened
5/25/2012	6:08:43 PM	Helium MFC set to  500.000000
5/25/2012	6:08:43 PM	H2 MFC set to  0.000000
5/25/2012	6:08:43 PM	BCl3 MFC set to  0.000000
5/25/2012	6:08:43 PM	PH3 MFC set to  0.000000
5/25/2012	6:08:43 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:08:43 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:08:43 PM	Tube furnace set to 0
5/25/2012	6:33:43 PM	Helium valve closed
5/25/2012	6:33:43 PM	H2 valve closed
5/25/2012	6:33:43 PM	BCl3 valve closed
5/25/2012	6:33:43 PM	PH3 valve closed
5/25/2012	6:33:43 PM	SiCl4 pre valve closed
5/25/2012	6:33:43 PM	SiCl4 post valve closed
5/25/2012	6:33:43 PM	Main Vac valve closed
5/25/2012	6:33:43 PM	Bypass valve closed
5/25/2012	6:33:43 PM	Bubbler valve closed
5/25/2012	6:33:43 PM	Helium MFC set to  0.000000
5/25/2012	6:33:43 PM	H2 MFC set to  0.000000
5/25/2012	6:33:43 PM	BCl3 MFC set to  0.000000
5/25/2012	6:33:43 PM	PH3 MFC set to  0.000000
5/25/2012	6:33:43 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:33:43 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:33:43 PM	Tube furnace set to 0
5/25/2012	6:38:36 PM	Run aborted at 6:38 PM
5/25/2012	6:38:36 PM	Helium valve closed
5/25/2012	6:38:36 PM	H2 valve closed
5/25/2012	6:38:36 PM	BCl3 valve closed
5/25/2012	6:38:37 PM	PH3 valve closed
5/25/2012	6:38:37 PM	SiCl4 pre valve closed
5/25/2012	6:38:37 PM	SiCl4 post valve closed
5/25/2012	6:38:37 PM	Bypass valve closed
5/25/2012	6:38:37 PM	Main Vac valve closed
5/25/2012	6:38:37 PM	Bubbler valve closed
5/25/2012	6:38:37 PM	Helium MFC set to  0.000000
5/25/2012	6:38:37 PM	H2 MFC set to  0.000000
5/25/2012	6:38:37 PM	BCl3 MFC set to  0.000000
5/25/2012	6:38:37 PM	PH3 MFC set to  0.000000
5/25/2012	6:38:37 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:38:37 PM	Tube furnace set to 0
5/25/2012	6:38:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	6:38:41 PM	Recipe started at 6:38 PM
5/25/2012	6:38:41 PM	Helium valve closed
5/25/2012	6:38:41 PM	H2 valve closed
5/25/2012	6:38:41 PM	BCl3 valve closed
5/25/2012	6:38:41 PM	PH3 valve closed
5/25/2012	6:38:41 PM	SiCl4 pre valve closed
5/25/2012	6:38:41 PM	SiCl4 post valve closed
5/25/2012	6:38:41 PM	Main Vac valve closed
5/25/2012	6:38:41 PM	Bypass valve closed
5/25/2012	6:38:41 PM	Bubbler valve closed
5/25/2012	6:38:41 PM	Helium MFC set to  0.000000
5/25/2012	6:38:41 PM	H2 MFC set to  0.000000
5/25/2012	6:38:41 PM	BCl3 MFC set to  0.000000
5/25/2012	6:38:41 PM	PH3 MFC set to  0.000000
5/25/2012	6:38:41 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:38:41 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:38:41 PM	Tube furnace set to 0
5/25/2012	6:38:44 PM	H2 valve closed
5/25/2012	6:38:44 PM	BCl3 valve closed
5/25/2012	6:38:44 PM	PH3 valve closed
5/25/2012	6:38:44 PM	SiCl4 pre valve closed
5/25/2012	6:38:44 PM	SiCl4 post valve closed
5/25/2012	6:38:44 PM	Main Vac valve closed
5/25/2012	6:38:44 PM	Bypass valve closed
5/25/2012	6:38:44 PM	Bubbler valve closed
5/25/2012	6:38:44 PM	Helium valve opened
5/25/2012	6:38:44 PM	Helium MFC set to  500.000000
5/25/2012	6:38:44 PM	H2 MFC set to  0.000000
5/25/2012	6:38:44 PM	BCl3 MFC set to  0.000000
5/25/2012	6:38:44 PM	PH3 MFC set to  0.000000
5/25/2012	6:38:44 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:38:44 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:38:45 PM	Tube furnace set to 0
5/25/2012	6:38:45 PM	Helium valve closed
5/25/2012	6:38:45 PM	H2 valve closed
5/25/2012	6:38:45 PM	BCl3 valve closed
5/25/2012	6:38:45 PM	PH3 valve closed
5/25/2012	6:38:45 PM	SiCl4 pre valve closed
5/25/2012	6:38:45 PM	SiCl4 post valve closed
5/25/2012	6:38:45 PM	Main Vac valve closed
5/25/2012	6:38:45 PM	Bypass valve closed
5/25/2012	6:38:45 PM	Bubbler valve closed
5/25/2012	6:38:45 PM	Helium MFC set to  0.000000
5/25/2012	6:38:45 PM	H2 MFC set to  0.000000
5/25/2012	6:38:45 PM	BCl3 MFC set to  0.000000
5/25/2012	6:38:45 PM	PH3 MFC set to  0.000000
5/25/2012	6:38:45 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:38:45 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:38:45 PM	Tube furnace set to 0
5/25/2012	6:38:46 PM	Run finished at 6:38 PM
5/25/2012	6:38:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2012	6:42:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2012	6:42:20 PM	Recipe started at 6:42 PM
5/25/2012	6:42:20 PM	Helium valve closed
5/25/2012	6:42:20 PM	H2 valve closed
5/25/2012	6:42:20 PM	BCl3 valve closed
5/25/2012	6:42:20 PM	PH3 valve closed
5/25/2012	6:42:20 PM	SiCl4 pre valve closed
5/25/2012	6:42:20 PM	SiCl4 post valve closed
5/25/2012	6:42:20 PM	Main Vac valve closed
5/25/2012	6:42:20 PM	Bubbler valve closed
5/25/2012	6:42:20 PM	Bypass valve opened
5/25/2012	6:42:20 PM	Helium MFC set to  0.000000
5/25/2012	6:42:20 PM	H2 MFC set to  0.000000
5/25/2012	6:42:20 PM	BCl3 MFC set to  0.000000
5/25/2012	6:42:20 PM	PH3 MFC set to  0.000000
5/25/2012	6:42:20 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:42:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:42:21 PM	Tube furnace set to 0
5/25/2012	6:43:27 PM	Helium valve closed
5/25/2012	6:43:27 PM	H2 valve closed
5/25/2012	6:43:27 PM	BCl3 valve closed
5/25/2012	6:43:27 PM	PH3 valve closed
5/25/2012	6:43:27 PM	SiCl4 pre valve closed
5/25/2012	6:43:27 PM	SiCl4 post valve closed
5/25/2012	6:43:27 PM	Main Vac valve closed
5/25/2012	6:43:27 PM	Bubbler valve closed
5/25/2012	6:43:27 PM	Bypass valve opened
5/25/2012	6:43:27 PM	Helium MFC set to  0.000000
5/25/2012	6:43:27 PM	H2 MFC set to  0.000000
5/25/2012	6:43:27 PM	BCl3 MFC set to  0.000000
5/25/2012	6:43:27 PM	PH3 MFC set to  0.000000
5/25/2012	6:43:27 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:43:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:43:27 PM	Tube furnace set to 0
5/25/2012	6:44:27 PM	Helium valve closed
5/25/2012	6:44:27 PM	H2 valve closed
5/25/2012	6:44:27 PM	BCl3 valve closed
5/25/2012	6:44:27 PM	PH3 valve closed
5/25/2012	6:44:27 PM	SiCl4 pre valve closed
5/25/2012	6:44:27 PM	SiCl4 post valve closed
5/25/2012	6:44:27 PM	Bypass valve closed
5/25/2012	6:44:27 PM	Bubbler valve closed
5/25/2012	6:44:27 PM	Main Vac valve opened
5/25/2012	6:44:27 PM	Helium MFC set to  0.000000
5/25/2012	6:44:27 PM	H2 MFC set to  0.000000
5/25/2012	6:44:27 PM	BCl3 MFC set to  0.000000
5/25/2012	6:44:27 PM	PH3 MFC set to  0.000000
5/25/2012	6:44:27 PM	SiCl4 MFC set to  0.000000
5/25/2012	6:44:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2012	6:44:27 PM	Tube furnace set to 0
5/25/2012	6:44:28 PM	Run finished at 6:44 PM
5/25/2012	6:44:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
